PERFLUOROALKYL SULFONAMIDES SURFACTANTS FOR PHOTORESIST RINSE SOLUTIONS
    2.
    发明申请
    PERFLUOROALKYL SULFONAMIDES SURFACTANTS FOR PHOTORESIST RINSE SOLUTIONS 有权
    全氟辛基磺酰胺表面活性剂用于光催化剂溶液

    公开(公告)号:US20140154632A1

    公开(公告)日:2014-06-05

    申请号:US14237193

    申请日:2012-08-01

    CPC classification number: G03F7/40 G03F7/405 H01L21/0273

    Abstract: A method of modifying a surface of a photoresist material including exposing the photoresist material to an aqueous ionic surfactant solution and varying the pH of the aqueous ionic surfactant solution until a fluorochemical layer is formed in or on the photoresist material. The aqueous ionic surfactant solution includes a perfluoroalkyl sulfonamide the formula: RfS02NH—R′ where Rf=CnF2n+1— and n=1 to 6, R′=—H, —CH3, and —CH2CH2OH. The aqueous ionic surfactant solution has a pH of within about 3 pH units of a pKa of the perfluoroalkyl sulfonamide.

    Abstract translation: 一种修饰光致抗蚀剂材料的表面的方法,包括将光致抗蚀剂材料暴露于水性离子表面活性剂溶液并改变离子表面活性剂水溶液的pH,直到在光致抗蚀剂材料中或其上形成含氟化合物层。 所述含水离子表面活性剂溶液包括式RfS02NH-R'的全氟烷基磺酰胺,其中Rf = CnF2n + 1-和n = 1-6,R'= -H,-CH3和-CH2CH2OH。 所述离子表面活性剂水溶液的pH值为所述全氟烷基磺酰胺的pKa的约3个pH单位。

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