SYSTEMS, METHODS, AND DEVICES FOR PRODUCING A MATERIAL WITH DESIRED CHARACTERISTICS USING MICROWAVE PLASMA

    公开(公告)号:US20230001376A1

    公开(公告)日:2023-01-05

    申请号:US17822356

    申请日:2022-08-25

    Applicant: 6K Inc.

    Abstract: The embodiments disclosed herein are directed to systems, methods, and devices for producing materials having desired characteristics using microwave plasma. In some embodiments, performing an iterative process may be used to produce a material having desired characteristics, the process comprising forming a microwave plasma within the reaction chamber, analyzing the plasma to determine if properties of the plasma are within a range expected to produce the desired characteristics of the material; and adjusting, based on the analysis of the plasma, one or more parameters. In some embodiments, an extension tube is provided within a microwave plasma apparatus to extend the length of a microwave plasma.

    Microwave plasma apparatus and methods for processing materials using an interior liner

    公开(公告)号:US12261023B2

    公开(公告)日:2025-03-25

    申请号:US18320655

    申请日:2023-05-19

    Applicant: 6K Inc.

    Abstract: The embodiments disclosed herein are directed to systems, methods, and devices for processing a material using a microwave plasma apparatus with an interior liner. In some embodiments, the liner comprises a reduction resistant material layer in direct contact with a hydrogen-containing plasma of a plasma processing apparatus. In some embodiments, the liner may comprise a sleeve disposed between a plasma and one or more concentric tubes of a plasma processing apparatus. In some embodiments, the liner may comprise a coating of material applied to the one or more concentric tubes. In some embodiments, the liner may comprise a flexible ceramic material, such as a ceramic ribbon that is coiled or wrapped in a helix shape spiraling around the interior of the one or more concentric tubes.

    MICROWAVE PLASMA APPARATUS AND METHODS FOR PROCESSING MATERIALS USING AN INTERIOR LINER

    公开(公告)号:US20230377848A1

    公开(公告)日:2023-11-23

    申请号:US18320655

    申请日:2023-05-19

    Applicant: 6K Inc.

    Abstract: The embodiments disclosed herein are directed to systems, methods, and devices for processing a material using a microwave plasma apparatus with an interior liner. In some embodiments, the liner comprises a reduction resistant material layer in direct contact with a hydrogen-containing plasma of a plasma processing apparatus. In some embodiments, the liner may comprise a sleeve disposed between a plasma and one or more concentric tubes of a plasma processing apparatus. In some embodiments, the liner may comprise a coating of material applied to the one or more concentric tubes. In some embodiments, the liner may comprise a flexible ceramic material, such as a ceramic ribbon that is coiled or wrapped in a helix shape spiraling around the interior of the one or more concentric tubes.

    SYSTEMS, METHODS, AND DEVICES FOR PRODUCING A MATERIAL WITH DESIRED CHARACTERISTICS USING MICROWAVE PLASMA

    公开(公告)号:US20230001375A1

    公开(公告)日:2023-01-05

    申请号:US17808967

    申请日:2022-06-24

    Applicant: 6K Inc.

    Abstract: The embodiments disclosed herein are directed to systems, methods, and devices for producing materials having desired characteristics using microwave plasma. In some embodiments, performing an iterative process may be used to produce a material having desired characteristics, the process comprising forming a microwave plasma within the reaction chamber, analyzing the plasma to determine if properties of the plasma are within a range expected to produce the desired characteristics of the material; and adjusting, based on the analysis of the plasma, one or more parameters. In some embodiments, an extension tube is provided within a microwave plasma apparatus to extend the length of a microwave plasma.

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