公开(公告)号：DE10314386A1

公开(公告)日：2004-10-07

申请号：DE10314386

申请日：2003-03-28

Applicant: ABB RESEARCH LTD

Inventor： SCHMIDT CHRISTIAN-JOACHIM ,  WETZKO MANFRED ,  VOGEL ALBRECHT ,  KRIPPNER PETER ,  BINZ DIETER ,  RUZZU ANTONIO ,  MERTE ROLF ,  MUELLER JOERG ,  KRUSEMARK OLAF

IPC: F15C5/00 ,  F16K99/00 ,  G05D7/06 ,  B81B7/00 ,  G01F1/56

Abstract: A flow regulation unit for adjusting the volume or mass flow of gaseous or liquid media in channels (6) of microtechnology components, has an adjustable flow resistance and flow sensor connected in series with a regulation unit whose input is connected to the flow sensor and whose output is connected to the flow resistance.

公开(公告)号：DE10121610A1

公开(公告)日：2002-11-07

申请号：DE10121610

申请日：2001-05-04

Applicant: ABB RESEARCH LTD

Inventor： SCHMIDT CHRISTIAN ,  WETZKO MANFRED ,  KRIPPNER PETER ,  VOGEL ALBRECHT ,  BINZ DIETER ,  MUELLER JOERG ,  LEHMANN U

IPC: G01N27/18 ,  G01N30/66

Abstract: A detector makes a quantitative determination of the proportion of a component (100) in a flowing medium. The detector has four electrical resistors (2, 3, 4, 5) forming a bridge (20) and in contact with the medium. The resistors are rated for current limited to a few milliamps. Two of the resistors (2, 3) are measuring resistors and two (4, 5) are reference resistors. Preferred Features: The resistors are positioned within but not in electrical contact with the component (101) in the medium (101). The measuring resistors (2, 3) are located in a measuring passage or in a side-branch of a measuring passage. Alternatively, they are located in an externally sealed diffusion chamber filled with a reference medium.

公开(公告)号：DE10013561A1

公开(公告)日：2001-09-27

申请号：DE10013561

申请日：2000-03-20

Applicant: ABB RESEARCH LTD

Inventor： BINZ DIETER ,  VOGEL ALBRECHT ,  LEHMANN UWE ,  KRUSEMARK OLAF ,  MUELLER JOERG ,  KEEPING SEAN

IPC: G01N30/88 ,  G01N30/02

Abstract: Measuring and evaluating device comprises an exchangeable gas analyzer (2) connected to a central unit (3) in which an evaluation unit (31) and a display unit (32) are integrated. Preferred Features: The gas analyzer is formed as a module and is directly connected from outside to the central unit. A supply circuit (37) for the electrical energy supply and lines (21, 22, 23) for a carrier gas are connected to the evaluation unit. One or more plates are detachedly inserted into the gas analyzer in which a separating channel is integrated.