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公开(公告)号：EP2960941B1
公开(公告)日：2017-01-04
申请号：EP14174099.3
申请日：2014-06-26
Applicant: ABB Schweiz AG
Inventor： Rahimo, Munaf , Arnold, Martin , Vobecky, Jan , Vemulapati, Umamaheswara
IPC: H01L29/74 , H01L29/744
CPC classification number: H01L29/7416 , H01L27/0664 , H01L29/744
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