公开(公告)号：WO2006066207A2

公开(公告)日：2006-06-22

申请号：PCT/US2005/045931

申请日：2005-12-17

Applicant: ADE CORPORATION

Inventor： JUDELL, Neil ,  GAO, Songping ,  TIEMEYER, Timothy, R.

IPC: H01J40/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The processing subsystem has a channel formation capability for forming selected channels and developing channel output associated with each selected channel, with the channel output developed from collector output associated with at least one collection and detection module. Also, a spherical defect channel is described for detection of small spherical objects and defects with like geometries, using scattered light observed by the back collector output and P-polarized scattered light observed by wing collectors.

Abstract translation: 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 处理子系统具有用于形成所选择的信道的信道形成能力和与每个选择的信道相关联的开发信道输出，其中信道输出从与至少一个收集和检测模块相关联的收集器输出开发。 另外，使用通过后集电极输出观察到的散射光和机翼收集器观察到的P偏振散射光，描述了用于检测小球形物体和类似几何形状的缺陷的球形缺陷通道。

公开(公告)号：WO2006066138A3

公开(公告)日：2006-06-22

申请号：PCT/US2005/045785

申请日：2005-12-17

Applicant: ADE CORPORATION

Inventor： BARAN, Bruce ,  GAO, Songping ,  BILLS, Richard, Earl ,  MURPHREE, Michael ,  KOLIOPOULOS, Chris, L.

IPC: G01N21/00 ,  G01B11/30 ,  G01B11/24

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.