公开(公告)号：WO2006066139A3

公开(公告)日：2006-06-22

申请号：PCT/US2005/045786

申请日：2005-12-17

Applicant: ADE CORPORATION

Inventor： BILLS, Richard, Earl ,  JUDELL, Neil ,  FREISCHLAD, Klaus, Reinhard

IPC: G01N21/00

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to, greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.

公开(公告)号：WO2006066207A2

公开(公告)日：2006-06-22

申请号：PCT/US2005/045931

申请日：2005-12-17

Applicant: ADE CORPORATION

Inventor： JUDELL, Neil ,  GAO, Songping ,  TIEMEYER, Timothy, R.

IPC: H01J40/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The processing subsystem has a channel formation capability for forming selected channels and developing channel output associated with each selected channel, with the channel output developed from collector output associated with at least one collection and detection module. Also, a spherical defect channel is described for detection of small spherical objects and defects with like geometries, using scattered light observed by the back collector output and P-polarized scattered light observed by wing collectors.

Abstract translation: 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 处理子系统具有用于形成所选择的信道的信道形成能力和与每个选择的信道相关联的开发信道输出，其中信道输出从与至少一个收集和检测模块相关联的收集器输出开发。 另外，使用通过后集电极输出观察到的散射光和机翼收集器观察到的P偏振散射光，描述了用于检测小球形物体和类似几何形状的缺陷的球形缺陷通道。

公开(公告)号：WO2006066136A3

公开(公告)日：2006-06-22

申请号：PCT/US2005/045783

申请日：2005-12-17

Applicant: ADE CORPORATION

Inventor： BILLS, Richard, Earl ,  JUDELL, Neil

IPC: G01N22/00

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.

公开(公告)号：WO2006066137A2

公开(公告)日：2006-06-22

申请号：PCT/US2005/045784

申请日：2005-12-17

Applicant: ADE CORPORATION

Inventor： JUDELL, Neil ,  KOHL, Ian, Thomas ,  GOA, Songping ,  BILLS, Richard, Earl

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的改变而改变输出狭缝的宽度。

公开(公告)号：WO2006066135A2

公开(公告)日：2006-06-22

申请号：PCT/US2005/045782

申请日：2005-12-17

Applicant: ADE CORPORATION

Inventor： ANDREWS, Scott ,  JUDELL, Neil ,  BILLS, Richard, Earl ,  TIEMEYER, Timothy, R.

IPC: G01B9/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The signal processing subsystem comprises a series of data acquisition nodes, each dedicated to a collection detection module and a plurality of data reduction nodes, made available on a peer to peer basis to each data acquisition nodes. Improved methods for detecting signal in the presence of noise are also provided.

Abstract translation: 提供表面检查系统以及相关的部件和方法。 表面检测系统包括光束源子系统，光束扫描子系统，工件移动子系统，光学采集和检测子系统以及处理子系统。 信号处理子系统包括一系列数据采集节点，每个数据采集节点专用于收集检测模块和多个数据缩减节点，以对等为基础可用于每个数据采集节点。 还提供了用于检测噪声情况下信号的改进方法。

公开(公告)号：WO2006066205A2

公开(公告)日：2006-06-22

申请号：PCT/US2005/045929

申请日：2005-12-17

Applicant: ADE CORPORATION

Inventor： BILLS, Richard, Earl ,  JUDELL, Neil ,  TIEMEYER, Timothy, R. ,  MCNIVEN, James, Peter

IPC: C12Q1/68

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 这些部件中的一些，最明显的是光束源子系统，光束扫描子系统和光学收集和检测子系统是模块化的，用于现场更换和/或维护。 光学收集和检测系统在后四分之一的四分之一区域中具有翼收集器和后收集器，用于从工件表面散射的收集光。 这可以大大提高系统的测量能力。 还包括使用翼收集器和后收集器检测不对称缺陷的方法。