公开(公告)号：WO9929477A9

公开(公告)日：1999-09-16

申请号：PCT/US9825631

申请日：1998-12-03

Applicant: ADVANCED REFRACTORY TECH

Inventor： BRAY DONALD J ,  VENKATRAMAN CHANDRA ,  OUTTEN CRAIG A ,  HALTER CHRISTOPHER G ,  GOEL ARVIND

IPC: B26B21/60 ,  B01J3/06 ,  B05D5/12 ,  B32B3/00 ,  B32B7/00 ,  B32B9/00 ,  B32B9/04 ,  B32B15/04 ,  B32B17/00 ,  B32B19/00 ,  C23C16/02 ,  C23C16/26 ,  C23C16/27 ,  C30B29/02 ,  B26B21/54 ,  B01J3/08 ,  B24D3/02 ,  B32B15/00 ,  C23C16/00 ,  H05H1/24

CPC classification number: B26B21/60 ,  C23C16/0245 ,  C23C16/0272 ,  C23C16/26 ,  Y10T428/24975 ,  Y10T428/265 ,  Y10T428/30 ,  Y10T428/31678

Abstract: The invention relates to fluorine-doped coatings which include a diamond-like composition containing carbon, silicon, oxygen, hydrogen, and fluorine on various substrates. Preferred substrates include flexible substrates, precision-edged substrates, and electrosurgical instruments. The present invention also relates to a method of making a substrate coated with a fluorine-doped diamond-like coating which includes positioning the substrate in a vacuum coating chamber and depositing a diamond-like composition containing carbon, silicon, oxygen, hydrogen, and fluorine onto the substrate by co-deposition of clusterless particle beams comprised of ions, atoms, or radicals of the carbon, silicon, oxygen, hydrogen, and fluorine, the mean free path of each particle species being in excess of the distance between its source and the growing particle coating surface of the substrate.

Abstract translation: 本发明涉及氟掺杂涂层，其包括在各种基材上含有碳，硅，氧，氢和氟的类金刚石组合物。 优选的基底包括柔性基底，精密边缘基底和电外科器械。 本发明还涉及一种制备涂覆有氟掺杂的类金刚石涂层的基材的方法，其包括将基材定位在真空涂覆室中并沉积含有碳，硅，氧，氢和氟的金刚石组合物 通过共沉积由碳，硅，氧，氢和氟的离子，原子或自由基组成的无簇粒子束，每个颗粒物质的平均自由程超过其源和 衬底生长的颗粒涂层表面。