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    SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION
    2.
    发明申请
    SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION 审中-公开
    基于源试剂的高质量流体输送用于分批沉积

    公开(公告)号：WO2013181521A3

    公开(公告)日：2014-02-27

    申请号：PCT/US2013043592

    申请日：2013-05-31

    Applicant: ADVANCED TECH MATERIALS

    Inventor： HENDRIX BRYAN C ,  GREGG JOHN N ,  BATTLE SCOTT L ,  NUALPHAITO DONN K ,  BARTOSH KYLE ,  CLEARY JOHN M ,  CHEON SEBUM

    IPC: C23C16/44 ,  C23C16/458

    CPC classification number: C23C16/458 ,  B01B1/005 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/455

    Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.

    Abstract translation: 公开了系统，试剂支撑盘，粒子抑制装置和方法。 在一个方面，一种系统包括蒸发器容器，该蒸发器容器具有包围内部容积的一个或多个内壁和被配置为在内部容积内垂直堆叠的多个试剂支撑盘。 多个试剂支撑托盘中的每一个构造成在内部空间内可垂直堆叠以形成一堆试剂支撑托盘。 多个试剂支撑托盘中的一个或多个配置成将通过相邻的试剂支撑托盘之间的气体流引导到试剂托盘的堆叠中，以引起气体流与特定试剂载体中的源试剂材料相互作用 在进入试剂托盘堆叠中的多个试剂载体托盘中的下一个之前，托盘。

    SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION
    4.
    发明专利
    SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION 未知

    公开(公告)号：SG11201407978WA

    公开(公告)日：2015-01-29

    申请号：SG11201407978W

    申请日：2013-05-31

    Applicant: ADVANCED TECH MATERIALS

    Inventor： HENDRIX BRYAN C ,  GREGG JOHN N ,  BATTLE SCOTT L ,  ΝΑITO DONN K ,  BARTOSH KYLE ,  CLEARY JOHN M ,  CHEON SEBUM ,  HODGES JORDAN

    IPC: C23C16/44 ,  C23C16/458

    Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.

    SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION
    6.
    发明申请
    SOURCE REAGENT-BASED DELIVERY OF FLUID WITH HIGH MATERIAL FLUX FOR BATCH DEPOSITION 审中-公开
    基于源试剂的高质量流体输送用于分批沉积

    公开(公告)号：WO2013181521A2

    公开(公告)日：2013-12-05

    申请号：PCT/US2013043592

    申请日：2013-05-31

    Applicant: ADVANCED TECH MATERIALS

    Inventor： HENDRIX BRYAN C ,  GREGG JOHN N ,  BATTLE SCOTT L ,  NUALPHAITO DONN K ,  BARTOSH KYLE ,  CLEARY JOHN M ,  CHEON SEBUM

    IPC: C23C16/44 ,  C23C16/458

    CPC classification number: C23C16/458 ,  B01B1/005 ,  C23C16/4402 ,  C23C16/4481 ,  C23C16/455

    Abstract: Systems, reagent support trays, particle suppression devices, and methods are disclosed. In one aspect, a system includes a vaporizer vessel having one or more interior walls enclosing an interior volume and a plurality of reagent support trays configured to be vertically stackable within the interior volume. Each of the plurality of reagent support trays is configured to be vertically stackable within the interior volume to form a stack of reagent support trays. One or more of the plurality of reagent support trays is configured to redirect a flow of a gas passing between adjacent reagent support trays in the stack of reagent support trays to cause the flow of gas to interact with the source reagent material in a particular reagent support tray before passing into a next of the plurality of reagent support trays in the stack of reagent support trays.

    Abstract translation: 公开了系统，试剂支撑盘，粒子抑制装置和方法。 在一个方面，一种系统包括蒸发器容器，该蒸发器容器具有包围内部容积的一个或多个内壁和被配置为在内部容积内垂直堆叠的多个试剂支撑盘。 多个试剂支撑托盘中的每一个构造成在内部空间内可垂直堆叠以形成一堆试剂支撑托盘。 多个试剂支撑托盘中的一个或多个配置成将通过相邻的试剂支撑托盘之间的气体流引导到试剂托盘的堆叠中，以引起气体流与特定试剂载体中的源试剂材料相互作用 在进入试剂托盘堆叠中的多个试剂载体托盘中的下一个之前，托盘。

    CANISTER GUARD
    7.
    发明申请
    CANISTER GUARD 审中-公开

    公开(公告)号：WO2005002979A3

    公开(公告)日：2005-09-15

    申请号：PCT/US2004019900

    申请日：2004-06-22

    Applicant: ADVANCED TECH MATERIALS ,  GREGG JOHN N ,  NAITO DONN

    Inventor： GREGG JOHN N ,  NAITO DONN

    IPC: B65B1/04 ,  B65B3/04 ,  B65D20060101 ,  C23C16/44 ,  F17C13/00

    CPC classification number: C23C16/4402 ,  C23C16/45561

    Abstract: A canister guard for preventing liquid contamination of an oulet to a canister containing liquid. The canister guard may include baffles extending from a sidewall. Additionally, the canister guard may be configured to be replacable or for retrofitting to conventional liquid chemical containing canisters.

    Abstract translation: 用于防止液体污染含有液体的罐的罐头的罐防护件。 罐护罩可以包括从侧壁延伸的挡板。 此外，罐防护件可以被配置为可更换或用于改装到常规的含液体化学容器的罐。

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