公开(公告)号：AU2003249279A1

公开(公告)日：2004-02-09

申请号：AU2003249279

申请日：2003-07-16

Applicant: ADVANCED TECH MATERIALS

Inventor： BAUM THOMAS H ,  BERNHARD DAVID ,  MINSEK DAVID ,  MURPHY MELISSA

IPC: C03C15/00 ,  C09K13/08 ,  G03F7/42 ,  H01L21/02 ,  H01L21/306 ,  H01L21/308 ,  H01L21/311 ,  C09K13/00 ,  H01L21/302

Abstract: A composition and process for wet stripping removal of sacrificial anti-reflective silicate material, e.g., from a substrate or article having such material deposited thereon, particularly where the sacrificial anti-reflective material is present with permanent silicate materials desired to be unaffected by the wet stripping composition.