中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

52 records (took 0.026 seconds)

    MATERIAL STORAGE AND DISPENSING SYSTEM AND METHOD WITH DEGASSING ASSEMBLY
    1.
    发明申请
    MATERIAL STORAGE AND DISPENSING SYSTEM AND METHOD WITH DEGASSING ASSEMBLY 审中-公开
    物料储存和分配系统及脱气组件的方法

    公开(公告)号：WO2011046802A2

    公开(公告)日：2011-04-21

    申请号：PCT/US2010051786

    申请日：2010-10-07

    Applicant: ADVANCED TECH MATERIALS ,  TOM GLENN ,  O'DOUGHERTY KEVIN T

    Inventor： TOM GLENN ,  O'DOUGHERTY KEVIN T

    IPC: B01D19/00 ,  B65D83/00 ,  B65D85/84

    CPC classification number: B01D19/0036 ,  B65D83/0055

    Abstract: The present disclosure relates to systems and methods which include a material receiving chamber for receiving a material (e.g., fluid containing medium) and an evacuable chamber configured to have vacuum applied thereto, and are configured to eliminate or at least reduce microbubble formation, eliminate or at least reduce unwanted diffusion of gas into the fluid containing medium being stored/dispensed, and/or remove at least a portion of gas or air bubbles entrained or dissolved in the fluid containing medium. Also disclosed are methods for controlling or reducing the concentration of gas in the material which may be subjected to external pressure during storage and/or dispensing.

    Abstract translation: 本公开涉及包括用于接收材料（例如，含有流体的介质）的材料接收腔室和被配置成具有施加到其上的真空的可抽空腔室的系统和方法，并且被配置为消除或至少减少微泡形成，消除或 至少减少气体向储存/分配的含流体介质中的不希望的扩散，和/或去除夹带或溶解在含流体介质中的至少一部分气体或气泡。 还公开了用于控制或减少在储存和/或分配期间可能受到外部压力的材料中的气体浓度的方法。

    PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY
    2.
    发明申请
    PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY 审中-公开
    用于气体输送的透气性气体组件

    公开(公告)号：WO2004053367B1

    公开(公告)日：2005-12-29

    申请号：PCT/US0337735

    申请日：2003-11-24

    Applicant: ADVANCED TECH MATERIALS

    Inventor： TOM GLENN

    IPC: F16K1/30 ,  F16K25/00 ,  F16K51/00

    CPC classification number: F16K1/303 ,  F16K25/00 ,  F17C2205/0338 ,  F17C2205/0391 ,  Y10T137/0318 ,  Y10T137/7793 ,  Y10T137/7823 ,  Y10T137/86759 ,  Y10T137/86887

    Abstract: A valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool comprising a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and provides a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.

    Abstract translation: 一种用于控制从较高压力流体源到低压处理工具的气体输送的阀组件，其包括可与阀座构件移动地接合的阀提升阀和定位在阀提升阀和阀座构件之间的流体可渗透插入件，其不暴露于流动 当阀提升阀处于关闭位置时，流体流动，从而防止流体流过阀组件，并且当阀提升阀处于打开位置时提供用于传送所有流动流体的扩散路径。 可渗透插入件可以插入到阀座构件或阀提升阀的可密封和可接合的表面中。

    6.
    发明专利
    未知

    公开(公告)号：DE69941737D1

    公开(公告)日：2010-01-07

    申请号：DE69941737

    申请日：1999-04-28

    Applicant: ADVANCED TECH MATERIALS

    Inventor： WANG LUPING ,  TOM GLENN

    IPC: F17C7/04 ,  C23C14/24 ,  C23C16/448 ,  F17C1/00 ,  F17C7/00 ,  F17C7/02 ,  F17C9/02 ,  F17C11/00 ,  F17C13/00 ,  F17C13/02 ,  F17C13/04 ,  H01L21/205 ,  H01L21/265 ,  H01L21/306

    Abstract: A fluid storage and dispensing system (10) comprising a vessel (12) for holding a fluid (17) at a desired pressure. The vessel has a pressure regulator (26) set at a predetermined pressure. The regulator may be interiorly or exteriorly positioned, single-staged or multi-staged, and is associated with a port of the vessel. A dispensing assembly, e.g. including a flow control means such as a valve (20), is arranged in gas/vapor flow communication with the regulator (26), whereby the opening of the valve effects dispensing of gas/vapor from the vessel (12). The fluid in the vessel may be constituted by a liquid that is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g. ambient (room) temperature.

    SUBSTANTIALLY RIGID COLLAPSIBLE LINER, CONTAINER AND/OR LINER FOR REPLACING GLASS BOTTLES, AND ENHANCED FLEXIBLE LINERS
    8.
    发明申请
    SUBSTANTIALLY RIGID COLLAPSIBLE LINER, CONTAINER AND/OR LINER FOR REPLACING GLASS BOTTLES, AND ENHANCED FLEXIBLE LINERS 审中-公开
    用于更换玻璃瓶的主要可靠的内胆，容器和/或内胆，以及增强的柔性衬里

    公开(公告)号：WO2012051093A3

    公开(公告)日：2012-07-12

    申请号：PCT/US2011055558

    申请日：2011-10-10

    Applicant: ADVANCED TECH MATERIALS ,  TOM GLENN ,  NELSON GREG ,  LIU WEI ,  KOLAND AMY ,  WARE DON

    Inventor： TOM GLENN ,  NELSON GREG ,  LIU WEI ,  KOLAND AMY ,  WARE DON

    IPC: B65D77/06 ,  B65D25/14 ,  B67D7/06

    CPC classification number: B65D37/00 ,  B32B1/02 ,  B65D25/16 ,  Y10T428/13

    Abstract: The present disclosure relates to a blow-molded, rigid collapsible liner that can be suitable particularly for smaller storage and dispensing systems. The rigid collapsible liner may be a stand-alone liner, e.g., used without an outer container, and may be dispensed from a fixed pressure dispensing can. Folds in the rigid collapsible liner may be substantially eliminated, thereby substantially reducing or eliminating the problems associated with pinholes, weld tears, and overflow. The present disclosure also relates to systems and liners, including the liners just mentioned, that may be used as alternatives to, or replacements for, simple rigid- wall containers, such as those made of glass. Such advantageous systems and liners may replace simple rigid-wall containers in a system for delivering a high purity material to a semiconductor process substantially without modification to an end user's existing pump dispense or pressure dispense systems.

    Abstract translation: 本发明涉及吹塑成型的刚性可折叠衬里，其特别适用于较小的储存和分配系统。 刚性可折叠内衬可以是独立的衬垫，例如在没有外部容器的情况下使用，并且可以从固定压力分配罐分配。 可以基本上消除刚性可折叠衬里中的折叠，从而基本上减少或消除与针孔，焊缝和溢流相关的问题。 本公开还涉及可以用作简单的刚性壁容器（例如由玻璃制成的）的替代或替代的系统和衬垫，包括刚刚提到的衬垫。 这种有利的系统和衬垫可以代替用于将高纯度材料输送到半导体工艺的系统中的简单的刚性壁容器，基本上不改变最终用户现有的泵分配或压力分配系统。

    METHODS AND APPARATUSES FOR MONITORING ORGANIC ADDITIVES IN ELECTROCHEMICAL DEPOSITION SOLUTIONS
    9.
    发明申请
    METHODS AND APPARATUSES FOR MONITORING ORGANIC ADDITIVES IN ELECTROCHEMICAL DEPOSITION SOLUTIONS 审中-公开
    用于监测电化学沉积溶液中有机添加剂的方法和装置

    公开(公告)号：WO2005111275A3

    公开(公告)日：2007-06-28

    申请号：PCT/US2005013836

    申请日：2005-04-21

    Applicant: ADVANCED TECH MATERIALS ,  HAN JIANWEN ,  KING MACKENZIE ,  WANG WEIHUA ,  TOM GLENN ,  JUNG JAY

    Inventor： HAN JIANWEN ,  KING MACKENZIE ,  WANG WEIHUA ,  TOM GLENN ,  JUNG JAY

    IPC: G01N27/42 ,  C25D3/38 ,  C25D5/18 ,  C25D21/12 ,  C25D21/14 ,  G01N27/26 ,  G06F19/00

    CPC classification number: C25D5/18 ,  C25D1/00 ,  C25D3/38 ,  C25D21/12 ,  C25D21/14 ,  G01N27/42 ,  H05K3/188 ,  H05K2203/163

    Abstract: The present invention relates in general to real-time analysis of electrochemical deposition (ECD) metal plating solutions, for the purpose of reducing plating defects and achieving high quality metal deposition. The present invention provides various new electrochemical analytical cell designs for reducing cross-contamination and increasing analytical signal strength. The present invention also provides improved plating protocols for increasing potential signal strength and reducing the time required for each measurement cycle. Further, the present invention provides new methods and algorithms for simultaneously determining concentrations of suppressor, accelerator, and leveler in a sample ECD solution within three experimental runs. A particularly preferred embodiment of the present invention provides a method for simultaneously determining concentrations of all three organic additives within a single experimental run by using a single analytical cell, while interactions between such additives are properly accounted for.

    Abstract translation: 本发明一般涉及电化学沉积（ECD）金属电镀溶液的实时分析，以减少电镀缺陷并实现高质量的金属沉积。 本发明提供用于减少交叉污染和增加分析信号强度的各种新的电化学分析池设计。 本发明还提供改进的电镀方案，用于增加潜在的信号强度并减少每个测量周期所需的时间。 此外，本发明提供了用于在三个实验运行中同时测定样品ECD溶液中的抑制剂，促进剂和矫味剂的浓度的新方法和算法。 本发明的一个特别优选的实施方案提供了一种通过使用单一分析电池同时测定单个实验运行中所有三种有机添加剂的浓度的方法，同时适当地考虑了这些添加剂之间的相互作用。

    LINER-BASED ASSEMBLY FOR REMOVING IMPURITIES
    10.
    发明申请
    LINER-BASED ASSEMBLY FOR REMOVING IMPURITIES 审中-公开
    基于LINER的组装去除违规行为

    公开(公告)号：WO2012058384A3

    公开(公告)日：2012-08-16

    申请号：PCT/US2011058013

    申请日：2011-10-27

    Applicant: ADVANCED TECH MATERIALS ,  TOM GLENN ,  DUBOIS LAWRENCE H

    Inventor： TOM GLENN ,  DUBOIS LAWRENCE H

    IPC: B65D25/14 ,  B32B1/02 ,  B65D81/24 ,  B65D85/84

    CPC classification number: F17C13/02 ,  B32B1/02 ,  B32B2307/724 ,  B32B2439/00 ,  B65D1/0215 ,  B65D23/02 ,  B65D25/14 ,  B65D25/16 ,  B65D81/24 ,  B65D85/84 ,  F17C11/00 ,  Y10T428/1321 ,  Y10T428/1352 ,  Y10T428/1359 ,  Y10T428/3154

    Abstract: The present disclosure relates to a liner for storing a material, the liner including at least two layers, wherein a layer that is in contact with the material is an active layer. The active layer may be made active by incorporating a scavenger into the layer. At least one layer of the liner may comprise a polymer or a fluoropolymer. In some embodiments, the active layer may be configured for removing microbridging components in photoresists. In some embodiments, the active layer may be made active by coating the interior of the layer with an inert material, such as glass. In further embodiments, the liner may be positioned within a stainless steel canister. The present disclosure also relates to a liner-based assembly including a liner for storing a material, an overpack within which the liner is positioned, and a purifying packet positioned between the liner and the overpack.

    Abstract translation: 本公开涉及一种用于存储材料的衬垫，所述衬垫包括至少两层，其中与材料接触的层是活性层。 活性层可以通过将清除剂并入该层而被制成活性层。 衬垫的至少一层可以包含聚合物或含氟聚合物。 在一些实施方案中，活性层可以被配置用于除去光致抗蚀剂中的微桥接组分。 在一些实施方案中，活性层可以通过用惰性材料（例如玻璃）涂覆该层的内部来制成活性层。 在另外的实施例中，衬套可以定位在不锈钢罐内。 本公开还涉及一种基于衬垫的组件，其包括用于存储材料的衬垫，衬垫定位在其中的外包装以及位于衬垫和外包装之间的净化包。

Patent Agency Ranking