公开(公告)号：WO2004039478B1

公开(公告)日：2006-03-23

申请号：PCT/US0333836

申请日：2003-10-27

Applicant: ADVANCED TECH MATERIALS

Inventor： STURM EDWARD ,  WANG LUPING ,  DIETZ JAMES

IPC: B01D53/04 ,  B01D53/02 ,  B01D59/26

CPC classification number: B01D53/04 ,  B01D2253/102 ,  B01D2259/40083 ,  B01D2259/40086 ,  B01D2259/40088 ,  B01D2259/4525 ,  Y10S95/901

Abstract: A germane storage and dispensing system, in which germane gas is sorptively retained on an activated carbon sorbent medium in a vessel containing adsorbed and free germane gas. The activated carbon sorbent medium is deflagration-resistant in relation to the germane gas adsorbed thereon, i.e., under deflagration conditions of 65 °C and 650 torr, under which free germane gas undergoes deflagration, the activated carbon sorbent medium does not sustain deflagration of the adsorbed germane gas or thermally desorb the germane gas so that it undergoes subsequent deflagration. The deflagration-resistance of the activated carbon sorbent medium is promoted by pre-treatment of the sorbent material to remove extraneous sorbables therefrom and by maintaining the fill level of the sorbent medium in the gas storage and dispensing vessel at a substantial value, e.g., of at least 30 %.

Abstract translation: 锗烷存储和分配系统，其中将锗烷气体吸附保留在含有吸附和游离的锗烷气体的容器中的活性炭吸附剂介质上。 活性炭吸附剂介质相对于其上吸附的锗烷气体，即在65℃和650乇的爆燃条件下，具有爆燃阻力，在此条件下，游离的锗烷气体经历爆燃，活性炭吸附剂介质不会维持爆燃 吸附的锗烷气体或热解吸锗烷气体，使其经历随后的爆燃。 通过预处理吸附剂材料来促进活性炭吸附剂介质的防爆性，以从其中除去外来的吸附物，并且通过将吸附剂介质在气体储存和分配容器中的填充水平保持在基本值，例如 至少30％。

公开(公告)号：WO2008048313A9

公开(公告)日：2008-07-31

申请号：PCT/US2006048371

申请日：2006-12-19

Applicant: ADVANCED TECH MATERIALS ,  CARRUTHERS J DONALD ,  XU XUEPING ,  WANG LUPING

Inventor： CARRUTHERS J DONALD ,  XU XUEPING ,  WANG LUPING

IPC: D01C5/00

CPC classification number: B01J20/205 ,  B01J20/20 ,  B01J21/185 ,  B01J23/74 ,  B01J23/881 ,  B01J23/882 ,  B01J23/883 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/02 ,  C01B2202/08 ,  C01B2202/36 ,  Y02P20/582

Abstract: A method and apparatus for manufacture of carbon nanotubes, in which a substrate is contacted with a hydrocarbonaceous feedstock containing a catalytically effective metal to deposit the feedstock on the substrate, followed by oxidation of the deposited feedstock to remove hydrocarbonaceous and carbonaceous components from the substrate, while retaining the catalytically effective metal thereon, and contacting of the substrate having retained catalytically effective metal thereon with a carbon source material to grow carbon nanotubes on the substrate. The manufacture can be carried out with a petroleum feedstock such as an oil refining atmospheric tower residue, to produce carbon nanotubes in high volume at low cost. Also disclosed is a composite including porous material having single-walled carbon nanotubes in pores thereof.

公开(公告)号：WO9956057A9

公开(公告)日：2000-08-10

申请号：PCT/US9909137

申请日：1999-04-28

Applicant: ADVANCED TECH MATERIALS

Inventor： WANG LUPING ,  TOM GLENN

IPC: C23C14/24 ,  C23C16/448 ,  F17C1/00 ,  F17C7/00 ,  F17C7/02 ,  F17C7/04 ,  F17C9/02 ,  F17C11/00 ,  F17C13/00 ,  F17C13/02 ,  F17C13/04 ,  H01L21/205 ,  H01L21/265 ,  H01L21/306

CPC classification number: F17C7/02 ,  B01D53/0407 ,  B01D53/0415 ,  B01D53/053 ,  B01D2253/10 ,  B01D2253/102 ,  B01D2253/104 ,  B01D2253/106 ,  B01D2253/1085 ,  B01D2253/202 ,  B01D2258/0216 ,  B01D2259/40003 ,  B01D2259/4009 ,  B01D2259/40094 ,  B01D2259/40098 ,  B01D2259/4525 ,  B01D2259/455 ,  B01J20/20 ,  F17C1/00 ,  F17C7/00 ,  F17C11/00 ,  F17C11/005 ,  F17C13/02 ,  F17C13/025 ,  F17C13/04 ,  F17C13/045 ,  F17C2201/0109 ,  F17C2201/0114 ,  F17C2201/058 ,  F17C2205/0329 ,  F17C2205/0338 ,  F17C2205/0341 ,  F17C2205/035 ,  F17C2205/0385 ,  F17C2205/0391 ,  F17C2223/0123 ,  F17C2223/033 ,  F17C2223/035 ,  F17C2250/043 ,  F17C2270/0518 ,  F17D1/04 ,  Y02E60/321

Abstract: A fluid storage and dispensing system (10) comprising a vessel (12) for holding a fluid (17) at a desired pressure. The vessel has a pressure regulator (26) set at a predetermined pressure. The regulator may be interiorly or exteriorly positioned, single-staged or multi-staged, and is associated with a port of the vessel. A dispensing assembly, e.g., including a flow control means such as a valve (20), is arranged in gas/vapor flow communication with the regulator (26), whereby the opening of the valve effects dispensing of gas/vapor from the vessel (12). The fluid in the vessel may be constituted by a liquid that is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g., ambient (room) temperature.

Abstract translation: 流体存储和分配系统（10）包括用于将流体（17）保持在期望压力的容器（12）。 容器具有设定在预定压力的压力调节器（26）。 调节器可以在内部或外部定位，单级或多级，并且与容器的端口相关联。 例如，包括诸如阀（20）的流量控制装置的分配组件布置成与调节器（26）气体/蒸汽流连通，由此阀的开口实现从容器中分配气体/蒸汽（ 12）。 容器中的流体可以由在主要温度条件例如环境（室内）温度下在超过其液化压力的压力下限制在容器中的液体构成。

公开(公告)号：WO02058858A9

公开(公告)日：2002-12-27

申请号：PCT/US0150913

申请日：2001-11-07

Applicant: ADVANCED TECH MATERIALS ,  ARNO JOSE ,  WANG LUPING ,  TOM GLENN M

Inventor： ARNO JOSE ,  WANG LUPING ,  TOM GLENN M

IPC: C23C16/44 ,  F17C1/00 ,  F17C7/00 ,  F17C11/00 ,  F17C13/02 ,  F17C13/04 ,  B08B9/08

CPC classification number: F17C1/00 ,  C23C16/4405 ,  F17C7/00 ,  F17C11/00 ,  F17C13/02 ,  F17C13/025 ,  F17C13/04 ,  F17C2201/0119 ,  F17C2201/056 ,  F17C2201/058 ,  F17C2203/0617 ,  F17C2205/0323 ,  F17C2205/0329 ,  F17C2205/0338 ,  F17C2205/0341 ,  F17C2205/0391 ,  F17C2221/01 ,  F17C2223/0153 ,  F17C2223/036 ,  F17C2225/0123 ,  F17C2225/033 ,  F17C2260/044 ,  F17C2265/017 ,  F17C2270/05

Abstract: An improved, non-plasma, static method for removing accumulated films and solid residues from interior surfaces of processing chambers used in thermal or plasma CVD treatment processes. The method includes introducing a reactive substance into a processing chamber while adjusting the pressure within the processing chamber to a predetermined level. The flow of the reactive substance into the processing chamber is terminated and the reactive substance is retained in the processing chamber to react with solid residues and form reaction products, following which the reaction products are subsequently removed from the processing chamber. Advantageously, terminating the flow of reactive substance into the processing chamber results in etching action that more effectively utilizes the cleaning agent and generates less hazardous materials.

Abstract translation: 一种用于从热处理室或等离子体CVD处理工艺中使用的处理室的内表面去除积聚的膜和固体残余物的改进的非等离子体静态方法。 该方法包括将反应物质引入处理室，同时将处理室内的压力调节至预定水平。 终止反应物质流入处理室，反应物质保留在处理室中，与固体残留物反应形成反应产物，随后将反应产物从处理室中除去。 有利地，终止反应物质流入处理室中导致蚀刻作用，其更有效地利用清洁剂并产生较少危险的材料。

公开(公告)号：WO0012196A9

公开(公告)日：2001-07-19

申请号：PCT/US9919868

申请日：1999-08-30

Applicant: ADVANCED TECH MATERIALS

Inventor： WANG LUPING ,  MCMANUS JAMES V

IPC: B01D53/04 ,  B01J4/02 ,  B01J20/08 ,  B01J20/10 ,  B01J20/14 ,  B01J20/16 ,  B01J20/18 ,  B01J20/20 ,  B01J20/26 ,  B01J20/34 ,  F17C11/00

CPC classification number: B01D53/0407 ,  B01D2253/102 ,  B01D2253/104 ,  B01D2253/106 ,  B01D2253/202 ,  B01D2253/308 ,  B01D2257/502 ,  B01D2257/504 ,  B01D2259/4525 ,  B01J20/18 ,  B01J20/20 ,  B01J20/28004 ,  B01J20/28019 ,  B01J2220/66 ,  F17C11/00 ,  F17C2205/0338 ,  F17C2205/0391 ,  Y02C10/08 ,  Y02E60/321

Abstract: A gas storage and dispensing system (10) includes a dispenser container (12) holding a physical sorbent material (16) having sorptive affinity for (i) a sorbable dispensing gas to be held in and subsequently selectively discharged from container (12), and (ii)extraneous sorbables, in which sorbent material (16) having extraneous sorbables sorbed thereon, is treated to desorb at least part of the extraneous sorbables therefrom. The treated sorbent material (16) is loaded in container (12), sorbable dispensing gas is introduced into container (12), for physical sorption of the dispensing gas on the sorbent material (16) and container (12) holding the dispensing gas on the sorbent material (16) is sealed, so that container (12) thereafter contains the dispensing gas in a high purity form, available for selective dispensing by desorption and discharging of the dispensing gas from container (12).

Abstract translation: 气体储存和分配系统（10）包括分配器容器（12），其容纳具有吸附亲和力的物理吸附材料（16），用于（i）可吸持的分配气体被保持并随后从容器（12）中选择性地排出;以及 （ii）其中吸附有外来吸附剂的吸附剂材料（16）被处理以从其中解吸至少部分外来可可吸收物的外来可吸取物。 经处理的吸附剂材料（16）装载在容器（12）中，可吸收的分配气体被引入容器（12）中，用于物理吸附吸附剂材料（16）上的分配气体和将分配气体保持在容器（12）上 吸附剂材料（16）被密封，使得容器（12）此后含有高纯度形式的分配气体，可用于通过从容器（12）的分解气体的解吸和排放来选择性地分配。

公开(公告)号：WO2009002893A2

公开(公告)日：2008-12-31

申请号：PCT/US2008067824

申请日：2008-06-22

Applicant: ADVANCED TECH MATERIALS ,  CARRUTHERS J DONALD ,  BOGGS KARL ,  WANG LUPING ,  WILSON SHAUN ,  ARNO JOSE I ,  MARGANSKI PAUL J ,  BILODEAU STEVEN M ,  ZOU PENG ,  BOBITA BRIAN ,  SWEENEY JOSEPH D ,  EDWARDS DOUGLAS

Inventor： CARRUTHERS J DONALD ,  BOGGS KARL ,  WANG LUPING ,  WILSON SHAUN ,  ARNO JOSE I ,  MARGANSKI PAUL J ,  BILODEAU STEVEN M ,  ZOU PENG ,  BOBITA BRIAN ,  SWEENEY JOSEPH D ,  EDWARDS DOUGLAS

IPC: F25B17/08 ,  F25B30/04 ,  F25B35/04

CPC classification number: B01J20/26 ,  B01J20/20 ,  B01J20/28054 ,  B01J20/28092 ,  B01J20/30 ,  B01J20/305 ,  B01J20/3078 ,  B01J2220/445 ,  C09K5/047 ,  F25B17/08 ,  F25B27/007 ,  F25B35/04 ,  F25B37/00 ,  F25B2500/01

Abstract: An adsorption structure is described that includes at least one adsorbent member formed of an adsorbent material and at least one porous member provided in contact with a portion of the adsorbent member to allow gas to enter and exit the portion of the adsorbent member. Such adsorption structure is usefully employed in adsorbent-based refrigeration systems. A method also is described for producing an adsorbent material, in which a first polymeric material is provided having a first density and a second polymeric material is provided having a second density, in which the second polymeric material is in contact with the first polymeric material to form a structure. The structure is pyrolyzed to form a porous adsorbent material including a first region corresponding to the first polymeric material and a second region corresponding to the second polymeric material, in which at least one of the pore sizes and the pore distribution differs between the first region and the second region.

Abstract translation: 描述了吸附结构，其包括由吸附剂材料形成的至少一个吸附构件和与吸附构件的一部分接触设置的至少一个多孔构件，以允许气体进入和离开吸附构件的该部分。 这种吸附结构在吸附剂型制冷系统中有用。 描述了一种用于生产吸附材料的方法，其中提供具有第一密度的第一聚合物材料，并且提供具有第二密度的第二聚合物材料，其中第二聚合物材料与第一聚合物材料接触， 形成一个结构。 该结构被热解以形成多孔吸附材料，其包括对应于第一聚合物材料的第一区域和对应于第二聚合物材料的第二区域，其中孔径和孔分布中的至少一个在第一区域和第 第二个地区。

公开(公告)号：WO2008048313A3

公开(公告)日：2008-09-25

申请号：PCT/US2006048371

申请日：2006-12-19

Applicant: ADVANCED TECH MATERIALS ,  CARRUTHERS J DONALD ,  XU XUEPING ,  WANG LUPING

Inventor： CARRUTHERS J DONALD ,  XU XUEPING ,  WANG LUPING

IPC: D01C5/00

CPC classification number: B01J20/205 ,  B01J20/20 ,  B01J21/185 ,  B01J23/74 ,  B01J23/881 ,  B01J23/882 ,  B01J23/883 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  C01B2202/02 ,  C01B2202/08 ,  C01B2202/36 ,  Y02P20/582

Abstract: A method and apparatus for manufacture of carbon nanotubes, in which a substrate is contacted with a hydrocarbonaceous feedstock containing a catalytically effective metal to deposit the feedstock on the substrate, followed by oxidation of the deposited feedstock to remove hydrocarbonaceous and carbonaceous components from the substrate, while retaining the catalytically effective metal thereon, and contacting of the substrate having retained catalytically effective metal thereon with a carbon source material to grow carbon nanotubes on the substrate. The manufacture can be carried out with a petroleum feedstock such as an oil refining atmospheric tower residue, to produce carbon nanotubes in high volume at low cost. Also disclosed is a composite including porous material having single-walled carbon nanotubes in pores thereof.

Abstract translation: 一种用于制造碳纳米管的方法和设备，其中使基材与含有催化有效金属的含烃原料接触以将原料沉积在基材上，接着氧化沉积的原料以从基材中除去烃质和碳质组分， 同时在其上保留催化有效金属，并将其上保留有催化有效金属的基材与碳源材料接触以在基材上生长碳纳米管。 可以用石油原料如炼油常压塔渣来进行制造，以低成本大量生产碳纳米管。 还公开了包括在其孔中具有单壁碳纳米管的多孔材料的复合物。

公开(公告)号：WO2007134183A3

公开(公告)日：2008-01-17

申请号：PCT/US2007068693

申请日：2007-05-10

Applicant: ADVANCED TECH MATERIALS ,  ARNO JOSE I ,  WANG LUPING ,  COOPER EMANUEL I

Inventor： ARNO JOSE I ,  WANG LUPING ,  COOPER EMANUEL I

IPC: B01J8/02 ,  B01J35/02

CPC classification number: F17C11/00

Abstract: A system (10) including a reagent supply container (12) in which a vessel (14) holds a composition including a chemical reagent dissolved or dispersed in a storage liquid (18) that is reversibly interactive with the chemical reagent to store the chemical reagent therein, and an ultrasonic energy source (19, 32, 34) adapted to introduce ultrasonic energy into the composition to liberate the chemical reagent therefrom for dispensing from the vessel of the reagent supply container. The ultrasonic energy source can be internally provided in the container, or may be provided as part of an external ultrasonic energy impingement unit (112), in which the stored chemical reagent, e.g., a microelectronic device manufacturing reagent, is extracted from the liquid storage medium for transport to a reagent-utilizing process or facility (38). The liquid storage medium may for example include an ionic liquid with which the chemical reagent is reversibly taken up, and subsequently released under ultrasonic energy exposure dispensing conditions.

Abstract translation: 一种系统（10），包括试剂供应容器（12），其中容器（14）保持包含溶解或分散在与化学试剂可逆地相互作用的储存液体（18）中的化学试剂的组合物，以储存化学试剂 和超声能量源（19,32,34），其适于将超声能量引入所述组合物中以释放其中的化学试剂，用于从所述试剂供应容器的容器分配。 超声能量源可以内部设置在容器中，或者可以作为外部超声波能量冲击单元（112）的一部分提供，其中存储的化学试剂例如微电子器件制造试剂从液体存储器 用于运送到试剂利用过程或设施（38）的介质。 液体存储介质可以例如包括离子液体，化学试剂可以通过该离子液体被可逆地吸收，并且随后在超声能量曝光分配条件下释放。

公开(公告)号：WO2008101257A3

公开(公告)日：2011-07-21

申请号：PCT/US2008054336

申请日：2008-02-19

Applicant: ADVANCED TECH MATERIALS ,  WODJENSKI MICHAEL J ,  WANG LUPING ,  ARNO JOSE I

Inventor： WODJENSKI MICHAEL J ,  WANG LUPING ,  ARNO JOSE I

IPC: B65D83/14 ,  B65D83/44 ,  F17C11/00

CPC classification number: B65D83/32 ,  B65D83/44 ,  F17C2205/035 ,  Y02E60/321

Abstract: A gas supply package, including a material storage and gas dispensing vessel defining an interior volume adapted to hold source material for the gas, with a gas dispensing stick in the interior volume. The gas dispensing stick includes at least one regulator coupled with a flow passage, with at least one generally planar filter element arranged to filter gas flowed through the flow passage prior to its flow through the regulator(s). The flow passage and the at least one generally planar filter element are arranged to produce: (i) a change in gas flow conductance in the vicinity of the filter element, and/or (ii) a direction of flow of gas at a non-zero angle with respect to the longitudinal axis of the vessel and/or to the longitudinal axis of the flow passage, for enhancement of capture efficiency of said filter element.

Abstract translation: 一种气体供应包，其包括限定适于保持用于气体的源材料的内部容积的材料储存和气体分配容器，在内部容积中具有气体分配棒。 气体分配棒包括与流动通道耦合的至少一个调节器，至少一个大体上平面的过滤器元件布置成过滤流过通道的气体在流过调节器之前。 流动通道和至少一个大体上平面的过滤器元件被布置成产生：（i）过滤元件附近的气体流动传导的变化，和/或（ii）在非过滤元件的气体流动方向， 相对于容器的纵向轴线和/或流动通道的纵向轴线成零角度，以增强所述过滤元件的捕获效率。

公开(公告)号：WO2009002893A3

公开(公告)日：2009-02-19

申请号：PCT/US2008067824

申请日：2008-06-22

Applicant: ADVANCED TECH MATERIALS ,  CARRUTHERS J DONALD ,  BOGGS KARL ,  WANG LUPING ,  WILSON SHAUN ,  ARNO JOSE I ,  MARGANSKI PAUL J ,  BILODEAU STEVEN M ,  ZOU PENG ,  BOBITA BRIAN ,  SWEENEY JOSEPH D ,  EDWARDS DOUGLAS

Inventor： CARRUTHERS J DONALD ,  BOGGS KARL ,  WANG LUPING ,  WILSON SHAUN ,  ARNO JOSE I ,  MARGANSKI PAUL J ,  BILODEAU STEVEN M ,  ZOU PENG ,  BOBITA BRIAN ,  SWEENEY JOSEPH D ,  EDWARDS DOUGLAS

IPC: F25B17/08 ,  F25B30/04 ,  F25B35/04

CPC classification number: B01J20/26 ,  B01J20/20 ,  B01J20/28054 ,  B01J20/28092 ,  B01J20/30 ,  B01J20/305 ,  B01J20/3078 ,  B01J2220/445 ,  C09K5/047 ,  F25B17/08 ,  F25B27/007 ,  F25B35/04 ,  F25B37/00 ,  F25B2500/01

Abstract: An adsorption structure is described that includes at least one adsorbent member formed of an adsorbent material and at least one porous member provided in contact with a portion of the adsorbent member to allow gas to enter and exit the portion of the adsorbent member. Such adsorption structure is usefully employed in adsorbent-based refrigeration systems. A method also is described for producing an adsorbent material, in which a first polymeric material is provided having a first density and a second polymeric material is provided having a second density, in which the second polymeric material is in contact with the first polymeric material to form a structure. The structure is pyrolyzed to form a porous adsorbent material including a first region corresponding to the first polymeric material and a second region corresponding to the second polymeric material, in which at least one of the pore sizes and the pore distribution differs between the first region and the second region.

Abstract translation: 描述了吸附结构，其包括由吸附剂材料形成的至少一个吸附构件和与吸附构件的一部分接触设置的至少一个多孔构件，以允许气体进入和离开吸附构件的该部分。 这种吸附结构在吸附剂型制冷系统中有用。 描述了一种用于生产吸附材料的方法，其中提供具有第一密度的第一聚合物材料和第二聚合物材料，其具有第二密度，其中第二聚合物材料与第一聚合物材料接触， 形成一个结构。 该结构被热解以形成多孔吸附材料，其包括对应于第一聚合物材料的第一区域和对应于第二聚合物材料的第二区域，其中孔径和孔分布中的至少一个在第一区域和第 第二个地区。