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    STORAGE AND FEED SYSTEM FOR GAS COMPOUND
    1.
    发明专利
    STORAGE AND FEED SYSTEM FOR GAS COMPOUND 失效

    公开(公告)号：JPH11264500A

    公开(公告)日：1999-09-28

    申请号：JP707399

    申请日：1999-01-13

    Applicant: ADVANCED TECH MATERIALS

    Inventor： TOM GLENN M ,  MCMANUS JAMES V

    IPC: B01D53/04 ,  B01J4/02 ,  B01J20/18 ,  B01J20/20 ,  F17C11/00

    Abstract: PROBLEM TO BE SOLVED: To provide a gas storage and measuring distribution system overcoming disadvantage of the conventional technique, in storage and measuring distribution of gas consisting of hydride and halide. SOLUTION: An adsorption-desorption device 102 and a storage measuring distribution method for gas compound, for instance, hydride and halide and compound a V-th organic metal compound are provided. Here, measuring distribution is performed selectively by differential pressure desorption from the sorption material of sorption-finished gas. The material of trace component effectively decomposing the sorption-finished gas in the device 102 is preferable, for instance, sorption material for losing concentration of a transition metal consisting of metal and oxide.

    ELECTROCHEMICAL DRIVE CIRCUITRY AND METHOD
    2.
    发明申请
    ELECTROCHEMICAL DRIVE CIRCUITRY AND METHOD 审中-公开
    电化学驱动电路和方法

    公开(公告)号：WO2005111592A3

    公开(公告)日：2007-04-26

    申请号：PCT/US2005013772

    申请日：2005-04-22

    Applicant: ADVANCED TECH MATERIALS ,  TOM GLENN M ,  LURCOTT STEVEN

    Inventor： TOM GLENN M ,  LURCOTT STEVEN

    IPC: G01N27/27 ,  G01N27/26 ,  G01N27/416 ,  G01N27/42

    CPC classification number: G01N27/42

    Abstract: An electrochemical drive circuitry and method, such as may be employed in electroplating bath chemical monitoring. A microcontroller can be utilized to selectively apply galvanostatic or potentiostatic conditions on the electrochemical cell, for measurement of response of the electrochemical cell to such conditions, with the microcontroller arranged to generate an offset potential to control potential across the electrochemical cell within a range of potential accommodated by a unipolar power supply, and/or a CMOS analog switch can be employed in combination with individual digital-to-analog converters for each of the current-controlled and potential-controlled conditions, to provide high-speed, dual mode operating capability.

    Abstract translation: 电化学驱动电路和方法，例如可用于电镀浴化学监测。 可以使用微控制器来选择性地对电化学电池施加恒电流或恒电势条件，用于测量电化学电池对这种条件的响应，微控制器被布置成产生在电势范围内跨越电化学电池的电位来控制电位 通过单极电源容纳的和/或CMOS模拟开关可以与各个数模转换器结合使用，用于每个电流控制和电位控制条件，以提供高速双模操作能力 。

    PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY
    4.
    发明申请
    PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY 审中-公开
    用于气体输送的透气性气体组件

    公开(公告)号：WO2007027496A2

    公开(公告)日：2007-03-08

    申请号：PCT/US2006033044

    申请日：2006-08-24

    Applicant: ADVANCED TECH MATERIALS ,  TOM GLENN M

    Inventor： TOM GLENN M

    IPC: F16K1/32 ,  F16K1/30 ,  F16K25/00

    CPC classification number: F16K1/303 ,  F16K1/32 ,  F16K1/385 ,  F16K1/42 ,  F16K25/00 ,  F16K25/005 ,  F17C2205/0338 ,  F17C2205/0391 ,  Y10T137/0318 ,  Y10T137/7793 ,  Y10T137/7823 ,  Y10T137/86759

    Abstract: A valve assembly. for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool. The valve assembly includes a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.

    Abstract translation: 阀组件。 用于控制从较高压力流体源到较低压力处理工具的气体输送。 阀组件包括可与阀座构件可移动地接合的阀提升阀和位于阀提升阀和阀座构件之间的流体可渗透插入件，当阀提升阀处于关闭位置时，该提升阀和阀座构件未暴露于流体流体，从而防止流体流过 阀组件并且当阀提升阀处于打开位置时提供用于传送所有流动流体的扩散路径。 可渗透插入件可以插入到阀座构件或阀提升阀的可密封和可接合的表面中。

    MONITORING AND CONTROLLING INDEPENDENT SYSTEMS IN A FACTORY
    5.
    发明申请
    MONITORING AND CONTROLLING INDEPENDENT SYSTEMS IN A FACTORY 审中-公开
    监控和控制工厂中的独立系统

    公开(公告)号：WO03040882A3

    公开(公告)日：2003-09-12

    申请号：PCT/US0235415

    申请日：2002-11-05

    Applicant: ADVANCED TECH MATERIALS ,  LURCOTT STEVEN M ,  TOM GLENN M ,  DUBOIS RAY ,  DIETZ JAMES A ,  ZITZMANN OLIVER A

    Inventor： LURCOTT STEVEN M ,  TOM GLENN M ,  DUBOIS RAY ,  DIETZ JAMES A ,  ZITZMANN OLIVER A

    IPC: G05B23/02 ,  G06F19/00 ,  G06F11/30

    CPC classification number: G05B21/02 ,  G05B2219/13 ,  G05B2219/25204 ,  G05B2219/31457 ,  Y02P80/40 ,  Y02P90/86

    Abstract: A method and apparatus (400) are provided for remotely configuring, operating and monitoring equipment (320, 330) in a manufacturing facility. An interface (230) is provided that allows a remote user to establish a connection with desired equipment (320, 330) in order to configure, operate or monitor the equipment (320,330). The disclosed interface (230) performs any required translation between the diverse equipment (320, 330) and protocols of different equipment manufacturers. A web-based connection to remote equipment allows a variety of diverse equipment systems to be accessed and controlled in a uniform manner. Historical data can be analyzed following a failure using pattern recognition techniques to identify data patterns that suggest an imminent failure.

    Abstract translation: 提供了一种方法和装置（400），用于在制造设施中远程配置，操作和监视设备（320,330）。 提供了一种接口（230），其允许远程用户与所需设备（320,330）建立连接，以便配置，操作或监视设备（320,330）。 公开的接口（230）执行不同设备（320,330）和不同设备制造商的协议之间的任何所需的转换。 与远程设备的基于Web的连接允许以统一的方式访问和控制各种各样的设备系统。 历史数据可以在故障之后使用模式识别技术进行分析，以识别提示即将发生故障的数据模式。

    LIQUID DISPENSING SYSTEMS ENCOMPASSING GAS REMOVAL
    6.
    发明申请
    LIQUID DISPENSING SYSTEMS ENCOMPASSING GAS REMOVAL 审中-公开
    液体分配系统去除气体

    公开(公告)号：WO2007146892A3

    公开(公告)日：2008-07-03

    申请号：PCT/US2007070911

    申请日：2007-06-11

    Applicant: ADVANCED TECH MATERIALS ,  WARE DONALD D ,  TOM GLENN M ,  DATHE PAUL ,  KOLAND AMY ,  GEROLD JASON ,  MIKKELSEN KIRK ,  O'DOUGHERTY KEVIN T ,  CISEWSKI MICHAEL A

    Inventor： WARE DONALD D ,  TOM GLENN M ,  DATHE PAUL ,  KOLAND AMY ,  GEROLD JASON ,  MIKKELSEN KIRK ,  O'DOUGHERTY KEVIN T ,  CISEWSKI MICHAEL A

    IPC: G01F11/00

    CPC classification number: B67D7/763 ,  B65D83/62 ,  B67D7/0261 ,  Y10T137/313

    Abstract: Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.

    Abstract translation: 描述了用于递送液体和气体或气体状态同时存在的各种材料的系统，优选地包括含有流体的可折叠衬垫。 在从其分配液体之前，从压力分配包装中取出顶空气体，然后在分配操作期间移除入口气体。 至少一个传感器感测储存器或气液分离区域中气体或气 - 液界面的存在。 包括整体储存器，至少一个传感器和至少一个流量控制元件的气体去除系统可以包括在适于与压力分配包装件配合的连接器内，用于从容器中分配的液体高效地去除气体 。

    PIEZOELECTRIC SENSOR AND METHOD
    8.
    发明申请
    PIEZOELECTRIC SENSOR AND METHOD 审中-公开
    压电传感器及方法

    公开(公告)号：WO9802926A8

    公开(公告)日：2001-06-21

    申请号：PCT/US9712165

    申请日：1997-07-11

    Applicant: ADVANCED TECH MATERIALS

    Inventor： TOM GLENN M ,  MILLER CYNTHIA A

    IPC: G01N27/00 ,  G01N29/036 ,  H01L41/08 ,  G01N29/02 ,  G01N33/00

    CPC classification number: G01N29/036 ,  G01N2291/0222

    Abstract: A sensor for detection of a trace fluid component in a fluid environment, comprising: a piezoelectric crystal having a fundamental resonant frequency in response to an applied oscillating electric field; a coating on the piezoelectric crystal of a sensor material which is reactive with the trace fluid component to yield a solid interaction product; means for applying an oscillating electric field to the piezoelectric crystal which generates an output resonant frequency therefrom; means for (i) sampling the output resonant frequency of the piezoelectric crystal while the oscillating electric field is applied thereto, (ii) determining the change in resonant frequency from the fundamental resonant frequency that occurs on formation of the solid interaction product when the sensor material interacts with the trace fluid in the fluid environment, and (iii) generating an output indicative of the presence of the trace fluid component in the environment; and means for flowing fluid from the fluid environment to the coating on the piezoelectric crystal so that the trace fluid component when present reacts with the coating to form the solid interaction product; wherein the coated piezoelectric crystal exhibits a frequency response rate to the trace fluid component in the range of from about 0.001 to about 1000 milleHertz/min./(part-per-million of the fluid component). The sensor may be utilized for sensing of breakthrough in dry scrubbing of gases in semiconductor manufacturing, as well as for sensing of contaminant and hazardous gas species in ambient fluid environments, for environmental monitoring applications.

    Abstract translation: 一种用于在流体环境中检测痕量流体组分的传感器，包括：响应于所施加的振荡电场而具有基本共振频率的压电晶体; 传感器材料的压电晶体上的涂层，其与微量流体组分反应以产生固体相互作用产物; 用于将振荡电场施加到从其产生输出谐振频率的压电晶体的装置; 用于（i）在施加振荡电场时对压电晶体的输出谐振频率进行采样的装置，（ii）当传感器材料形成时，确定在形成固体相互作用产物时发生的基本共振频率的谐振频率的变化 与流体环境中的微量流体相互作用，和（iii）产生指示环境中微量流体组分的存在的输出; 以及用于将流体从流体环境流动到压电晶体上的涂层的装置，使得当存在的痕量流体组分与涂层反应以形成固体相互作用产物; 其中涂覆的压电晶体对痕量流体组分的频率响应速率在约0.001至约1000毫巴/分钟/（流体组分的百万分之一）的范围内。 该传感器可用于感测半导体制造中的气体干洗中的突破，以及用于感测环境流体环境中的污染物和有害气体物质的环境监测应用。

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