公开(公告)号：US20030155522A1

公开(公告)日：2003-08-21

申请号：US10383953

申请日：2003-03-07

Applicant: ADVANTEST CORPORATION

Inventor： Yoshihisa Ooae ,  Yoichi Shimizu ,  Takamasa Satoh ,  Takeshi Haraguchi

IPC: H01J027/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/065 ,  H01J37/3177

Abstract: An electron beam generating apparatus for generating a plurality of electron beams, which includes: a plurality of cathodes for generating thermoelectrons; a cathode power supply unit for applying negative voltage to the cathodes so as to emit the thermoelectrons from the cathodes; a plurality of grids, which correspond to the plurality of cathodes respectively, for focusing the thermoelectrons emitted from each of the plurality of cathodes, and shaping the plurality of electron beams; and an insulator on which the plurality of cathodes and the plurality of grids are attached.

Abstract translation: 一种用于产生多个电子束的电子束产生装置，包括：多个用于产生热电子的阴极; 用于向阴极施加负电压以从阴极发射热电子的阴极电源单元; 分别对应于多个阴极的多个栅格，用于聚焦从多个阴极中的每一个发射的热电子，并对多个电子束进行成形; 以及绝缘体，多个阴极和多个栅极连接在该绝缘体上。

公开(公告)号：US20030201720A1

公开(公告)日：2003-10-30

申请号：US10434620

申请日：2003-05-09

Applicant: ADVANTEST CORPORATION

Inventor： Yoshihisa Ooae ,  Yoichi Shimizu

IPC: H01K001/62

CPC classification number: H01J37/065 ,  H01J2237/06308 ,  H01J2237/3175

Abstract: An electron beam generating device, wherein a high-resistance film is formed on the outer surface of an insulator provided with a cathode for emitting thermal electrons and a grid for collecting thermal electrons and forming an electron beam to allow a feeble current to flow to the high-resistance film, thereby preventing the accumulation of thermal electrons on the insulator and discharging. The upper portion of the high-resistance film connected to a chamber supplies an approximate reference potential to the upper portion of the film, and the lower portion of the high-resistance film connected to the grid supplies almost the same potential as that of the grid to the lower portion of the film to allow a feeble current to flow to the film. The prevention of accumulation of thermal electrons on the insulator can prevent discharging, accurately control the current capacity of an electron beam, and give the electron beam generating device a longer service life.

Abstract translation: 一种电子束产生装置，其中在设置有用于发射热电子的阴极的绝缘体的外表面上形成高电阻膜，以及用于收集热电子并形成电子束的栅格，以使微弱电流流向 高电阻膜，从而防止热电子在绝缘体上的积聚和放电。 连接到室的高电阻膜的上部向膜的上部提供近似的参考电位，并且连接到电网的高电阻膜的下部提供与电网几乎相同的电位 到薄膜的下部以允许微弱的电流流向胶片。 防止热电子在绝缘体上的堆积可以防止放电，精确地控制电子束的电流，并给予电子束产生装置更长的使用寿命。