公开(公告)号：US10437046B1

公开(公告)日：2019-10-08

申请号：US15145803

申请日：2016-05-04

Applicant: AG Microsystems Inc.

Inventor： Asif Godil ,  Chase Valiente

IPC: G02B26/08 ,  G02B26/10 ,  G02B7/00 ,  G02B7/02 ,  B81B7/00 ,  B81B7/02

Abstract: Two-axis MEMS Micromirror is disclosed featuring combs drive actuation with independent drive for each of two axes of rotation and a layered hinge design providing an improved shock and vibration performance. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, actuation voltages are driven to an inner axis through multiple layers in one or more outer hinges, allowing for a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration. Furthermore, this novel design achieves set angles that are highly stable over time.

公开(公告)号：US11726312B2

公开(公告)日：2023-08-15

申请号：US17844617

申请日：2022-06-20

Applicant: AG MICROSYSTEMS, INC.

Inventor： Asif Godil ,  Chase Valiente

IPC: G02B26/08 ,  G02B26/10 ,  B81B7/00 ,  B81B7/02

CPC classification number: G02B26/0841 ,  G02B26/0833 ,  B81B7/0003 ,  B81B7/02 ,  B81B2201/04 ,  B81B2203/0145 ,  B81B2207/091 ,  G02B26/101 ,  G02B26/105

Abstract: A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.

公开(公告)号：US11372234B2

公开(公告)日：2022-06-28

申请号：US16593068

申请日：2019-10-04

Applicant: AG MICROSYSTEMS, INC.

Inventor： Asif Godil ,  Chase Valiente

IPC: G02B26/08 ,  G02B26/10 ,  B81B7/00 ,  B81B7/02

Abstract: A layered hinge design providing an improved shock and vibration performance for a two-axis MEMS Micromirror featuring combs drive actuation with independent drive and control for rotating the Micromirror along two-axis of rotation. The two-axis MEMS Micromirror is fabricated using Double SOI wafer as the primary starting material. In addition, a plurality of actuation voltages are driven via conductive layers forming one or more hinges allowing the Micromirror to rotate along the two-axis of rotation. The layered hinge design achieves set angles that are highly stable over time and provides a robust and reliable micromirror that is easy to drive with multiple DC voltages, and moderately insensitive to temperature, shock and vibration.