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公开(公告)号：JPH09296280A
公开(公告)日：1997-11-18
申请号：JP13422996
申请日：1996-04-30
Applicant: AGENCY IND SCIENCE TECHN
Inventor： MATSUDA JUN , UCHIUMI AKIHIRO , YONEDA MICHIFUMI , KATSUMURA MUNEHIDE
Abstract: PROBLEM TO BE SOLVED: To suppress the unstable state of arc caused by the fluctuation of the arc length generated at the time of treating a metallic surface using arc discharge and to modify the surface of a metallic material at a high speed by stable arc. SOLUTION: Arc is generated between the surface of a metallic material and a metallic electrode to melt the surface of the metallic material, and while a part of metal constituting the electrode or a reactive gas in the atmosphere is melted therein, the surface of the metallic material is modified. In this case, the melted part is irradiated with a laser beam, or, the metallic electrode is fixed, and while the metallic material is moved and also while a laser beam is oscillated in a direction crossing with the moving direction, the melted part is irradiated with the laser beam.
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公开(公告)号：JPH08127872A
公开(公告)日：1996-05-21
申请号：JP35001391
申请日：1991-12-10
Applicant: AGENCY IND SCIENCE TECHN
Inventor： YANO TETSUO , YONEDA MICHIFUMI , KATSUMURA MUNEHIDE , MATSUDA JUN , UCHIUMI AKIHIRO
Abstract: PURPOSE: To produce a film having high hardness and furthermore good in adhesion by forming a boron nitride film on the surface of a metallic material, irradiating the same film with a laser beam and forming a boron nitride film thereon. CONSTITUTION: The inside of a vacuum vessel 1 charged with a metallic material 11 is exhausted to about 5×10 Torr, and gaseous N2 is flowed therein. This gaseous N2 is ionized by an ion impregnating device 3 and is impregnated into the metallic material 11. Simultaneously, the material 6 to be vapor- deposited constituted of boron in a crucible 5 is irradiated with an electron beam 8, and the metallic material 11 is vapor-deposited with the evaporated boron to form a boron nitride film on the surface of the metallic material 11 with tight adhesion. Next, a laser beam 9 is introduced into the vacuum vessel 1, is converged by a lens 10 and is applied to the boron nitride film on the surface of the metallic material 11 to form a baron nitride film. Thus, the metallic material 11 high in surface hardness and excellent in wear resistance and sliding properties can efficiently be produced.
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公开(公告)号：JPS61264168A
公开(公告)日：1986-11-22
申请号：JP10566485
申请日：1985-05-16
Applicant: AGENCY IND SCIENCE TECHN
Inventor： KATSUMURA MUNEHIDE , UCHIUMI AKIHIRO , MATSUDA JUN , NAGATA SHIGEYUKI , SUGASAKA KAZUHIKO
Abstract: PURPOSE:To form simply a sprayed film having the adhesive degree of a high reliability, by supplying metal or inorganic material to high energy density part where laser beams are converged by a condenser lenses, heating, melting and blasting the material with gaseous flow to a material to be sprayed. CONSTITUTION:The laser beams 1 irradiated from a laser generator 1' are introduced into a spray nozzle 5 having a connecting part 6 for lenses protecting gas, a connecting part 7a for powder and carrier gas thereof and a connecting part 8 for high pressure gas, etc. through the condenser lenses 2, and conveyed to a focus 3 outside a main nozzle 9. A wire 13 of metal or inorganic material or powder is supplied to the focus 3 from a wire supplying apparatus 12' or powder supplying apparatus through a wire supplying tip 12 or a nozzle 7b, heated and melted thereat. The molten material is blasted by gaseous flow jetted from a high pressure gas nozzle 10, to the material 14 to be sprayed, heated by irradiation of the beams 1 and moving in arrow direction, to form the sprayed film 15.
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公开(公告)号：JP2000254791A
公开(公告)日：2000-09-19
申请号：JP5934799
申请日：1999-03-05
Applicant: AGENCY IND SCIENCE TECHN , MITSUI SHIPBUILDING ENG
Inventor： MATSUDA JUN , UCHIUMI AKIHIRO , YONEDA MICHIFUMI , KATSUMURA MUNEHIDE , TASODA TAKASHI
IPC: B23K9/04 , B23K9/12 , B23K26/082 , B23K26/21 , B23K26/32 , B23K26/34 , B23K26/346 , F16C33/12 , F16C33/14 , B23K26/00 , B23K26/08
Abstract: PROBLEM TO BE SOLVED: To provide a device and a method for cladding by welding for a white metal for bearing in which the welding speed is increased by jointly using the arc discharge and the laser beam, the penetration ratio of a welding base metal (iron Fe) is small, and the seizure resistance and the bearing pressure resistance are excellent. SOLUTION: In a cladding by welding device, the cladding by welding is implemented by melting a surface of a bearing base metal by the arc discharge and the laser beam 3, and feeding the white metal alloy for bearing to the molten portion. A laser beam generating means which achieves the weaving orthogonal to the welding advancing direction, has the plume, and forms a molten pool on the surface of the bearing base metal is provided. An arc generating means which is inclined forward in the welding advancing direction with respect to the laser beam, and melts the bearing base metal together with the laser beam to form the molten pool through the plume of the laser beam 3 is provided. A bearing white metal alloy wire feeding means which is inclined backward in the welding advancing direction with respect to the laser beam 3 to feed the white metal alloy wire for bearing to the molten pool is provided.
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公开(公告)号：JPH11335817A
公开(公告)日：1999-12-07
申请号：JP13835998
申请日：1998-05-20
Applicant: OKURA INDUSTRIAL CO LTD , AGENCY IND SCIENCE TECHN
Inventor： OYA TOSHIHIKO , YANO TETSUO , YONEDA MICHIFUMI , KATSUMURA MUNEHIDE , KAJITANI TAKAHIRO , TANAKA OSAMU , TANGE YOSHIHIRO , MATSUDA HIDEAKI
Abstract: PROBLEM TO BE SOLVED: To provide a method for forming an amorphous thin film substantially maintaining the chemical structure of an org. optical function material on a substrate without using a large-scale apparatus. SOLUTION: This amorphous thin film forming method for the org. optical function material is a method of forming the thin film by irradiating a target consisting of a low molecular org. compd. having an optical function with a UV light laser 3 to vaporize the low molecular org. compd. and depositing the vaporized low molecular org. compd. on a substrate 11, in which the irradiation intensity E (mJ/cm ) of the UV laser satisfies the conditions: C×1.5 ) of the UV light laser at which the vaporized low molecular org. compd. substantially begins to be deposited.
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Patent Agency Ranking
公开(公告)号：JPH11229120A
公开(公告)日：1999-08-24
申请号：JP4444298
申请日：1998-02-10
Applicant: AGENCY IND SCIENCE TECHN
Inventor： YANO TETSUO , OYA TOSHIHIKO , YONEDA MICHIFUMI , KATSUMURA MUNEHIDE
Abstract: PROBLEM TO BE SOLVED: To form a transparent electroconductive thin film excellent in electrical resistivity and the visible ray transmissivity even on a plastic substrate without any deformation by achieving the vapor deposition of an oxide semi-conductor while irradi ating the substrate kept at ambient temperature in a non-heated condition with the ultraviolet laser beam. SOLUTION: A substrata 8 formed of a glass, a semi-conductor, a plastic, etc., which is mounted on a holder 10 is arranged in a vacuum container 1, and an oxygen atmosphere of approximately 10 to 10 Torr. is formed through an oxygen gas introduction pipe 3 and a vacuum pump 11. A vaporization source 5 is heated by a power supply 12 to vaporize an oxide semi-conductor such as ITO, and the oxide semi-conductor is vapor-deposited on the substrate 8 in a non-heated condition. At the same time, the substrate 8 is irradiated with the ultraviolet laser beam 5 such as the excimer laser beam from a laser beam oscillator 9 through a quartz window 4. The energy density of the ultraviolet laser beam is controlled by a laser beam output regulating optical system 7 according to the physical properties of the oxide semi-conductor. A vapor deposition thin film is stabilized through optical pumping to form a transparent electroconductive thin film having excellent quality.
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公开(公告)号：JPH08325722A
公开(公告)日：1996-12-10
申请号：JP15981195
申请日：1995-06-01
Applicant: AGENCY IND SCIENCE TECHN
Inventor： YANO TETSUO , OYA TOSHIHIKO , YONEDA MICHIFUMI , KATSUMURA MUNEHIDE
Abstract: PURPOSE: To form, with superior adhesion, a vapor deposited film, e.g. of dissimilar metal or nitride type ceramics, excellent in wear resistance, corrosion resistance, etc., on the surface of a metallic formed body of complicated shape, such as the inner surface of a pipe. CONSTITUTION: A metallic formed body and a target material for vapor deposition are allowed to coexist in a vacuum zone. At first, the surface of the metallic formed body is irradiated with excimer laser to remove the existing oxide layer, and then the target material for vapor deposition is irradiated with excimer laser to perform sputtering treatment, by which vapor deposition is applied to the surface of the metallic formed body. The vapor deposition appratus for the surface of the metallic formed body, used in this method, is composed of a work supporting part 8, a target 7 disposed in the position opposite to it, a concave mirror 5 for projecting an introduced laser 3 onto the surface of the work, and a condenser lens 6 for concentrating the laser 3 and projecting it onto the target to the inside of a hermetically sealed vessel 1 having a laser-introducing hole 4 and an exhaust hole 2 connecting to a vacuum system.
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公开(公告)号：JPH0757739A
公开(公告)日：1995-03-03
申请号：JP21699993
申请日：1993-08-09
Applicant: AGENCY IND SCIENCE TECHN
Inventor： YONEDA MICHIFUMI , UCHIUMI AKIHIRO , KATSUMURA MUNEHIDE , KATO SHUNSAKU , EZAKA YUKIO
Abstract: PURPOSE:To provide a fuel electrode for high temperature type fuel cell by flame-spraying an electrode forming metal on the surface of a solid electrolyte consisting of stabilized zirconia in an inert gas atmosphere and whereby forming an electrode coat. CONSTITUTION:A work 7 is held by a two-axis drive holder 9 and a flame spraying material 3 is flame-sprayed thereon by a focused lens beam 2, and a flame-sprayed film 8 is laminated by pulverizing a molten metal by a spray gas 4 in the form of a spray 6. The work 7 is fitted in a vacuum container 10 and N2 is injected therein at a specific vacuum degree, while N2 is ionized by an ion beam generator 12 and is applied on the work 7, to form a granular porous metal coat on a stabilized zirconia solid electrolyte. The surface on which a film is coated is provided as a fuel electrode agent. The film is thermally stabilized and has good adhesiveness with the electrolyte, while the film is not easily oxidated and is homogeneous.
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公开(公告)号：JPH07112330A
公开(公告)日：1995-05-02
申请号：JP28178093
申请日：1993-10-15
Applicant: AGENCY IND SCIENCE TECHN
Inventor： YANO TETSUO , OYA TOSHIHIKO , YONEDA MICHIFUMI , UCHIUMI AKIHIRO , KATSUMURA MUNEHIDE , MATSUDA JUN
Abstract: PURPOSE:To efficiently manufacture a joining body without lowering of characteristics and deformation for materials due to joining by radiating laser beam on a ceramics surface so as to deposit the metallic element of a ceramics component on its irradiated part, and joining metallic materials together through this metallic layer. CONSTITUTION:Argon gas is led to flow into a vacuum container after both joining samples 7, 8 are mounted into a joining jig 9 in the vacuum container 1 having an exhaust system 2 to keep its inside under vacuum and the degree of vacuum in the vacuum container is set by exhaust to approximately 5X10 Torr with the exhaust system 2. A laser beam 3 is radiated on the joining sample 7 through a condensing lens 4 so as to deposit the metallic element of a ceramics component on the irradiated part after argon gas is ionized by an ion beam generator 5 and radiated on both joining samples 7, 8. Next, the joining samples 7, 8 are brought in contact with each other and pressurized by the joining jig 9, and heated at a low temperature by irradiation of the ion beam 6. By this process, the joining body for ceramics having the strong joining strength and metallic materials can be formed at a low temperature.
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公开(公告)号：JPS62177166A
公开(公告)日：1987-08-04
申请号：JP1898086
申请日：1986-01-30
Applicant: AGENCY IND SCIENCE TECHN
Inventor： UCHIUMI AKIHIRO , KATSUMURA MUNEHIDE , MATSUDA JUN , NAGATA SHIGEYUKI
Abstract: PURPOSE:To form various kinds of thermally sprayed films having excellent adhesiveness by melting a metallic wire by a laser beam and spraying the same by various gases onto the surface of a stock heated by the laser beam in the stage of forming the thermally sprayed films of metals and metallic compd. by utilizing the laser beam into the surface of the stock. CONSTITUTION:The laser beam 1 is condensed by a condenser lens 2 and the top end of the metallic wire 6 to be thermally sprayed is fed to the focal position thereof where the top end of the wire is melted by heating. A nonreactive gas such as Ar or reactive gas 8 such as O2, N2, NH3 or hydrocarbon is ejected from a gas nozzle 7 provided above said position and the thermally sprayed films are formed on the stock 9 in the form of a molten metal or fine particles 10 of the oxide, nitride or carbide of the metal. The metallic wire 6 to be thermally sprayed is advanced through a hole 5 of a parabola reflecting mirror 4 to the laser beam to the focal point 3 of the laser beam and the surface of the stock 9 is irradiated and heated by the laser beam 13 reflected by the reflecting mirror 4, by which the thermally sprayed film 12 of the metal or metallic compd. having the excellent adhesiveness is formed on the stock 9.
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