公开(公告)号：GB2347145B

公开(公告)日：2001-05-02

申请号：GB0004398

申请日：2000-02-24

Applicant: AGENCY IND SCIENCE TECHN

Inventor： MIZUTA SUSUMA ,  TSUCHIVA TETSUO ,  WATANABE AKIO ,  IMAI YOJI ,  YAMAGUCHI IWAO ,  KUMAGAI TOSHIYA ,  MANABE TAKAAKI ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: C01G1/02 ,  C08F2/48 ,  C23C18/12 ,  C23C18/14

Abstract: There is disclosed a method for producing a metal oxide, which comprises the steps of: dissolving a metal organic compound (e.g. a metal organic acid salt, a metal acetylacetonato complex, and a metal alkoxide having an organic group with 6 or more carbon atoms) in a solvent to provide a state of solution, applying the solution onto a substrate, drying the solution, and subjecting the resultant substrate to irradiation with a laser light of a 400 nm or less wavelength, to form a metal oxide on the substrate. According to that method, a metal oxide can be produced without applying a heat treatment at a high temperature of the degree adopted in the conventionally known application thermal decomposition method.

公开(公告)号：GB2347145A

公开(公告)日：2000-08-30

申请号：GB0004398

申请日：2000-02-24

Applicant: AGENCY IND SCIENCE TECHN

Inventor： MIZUTA SUSUMA ,  TSUCHIVA TETSUO ,  WATANABE AKIO ,  IMAI YOJI ,  YAMAGUCHI IWAO ,  KUMAGAI TOSHIYA ,  MANABE TAKAAKI ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: C01G1/02 ,  C08F2/48 ,  C23C18/12 ,  C23C18/14

Abstract: A method for producing a metal oxide, comprises the steps of: dissolving a metal organic compound (e.g. a metal organic acid salt, a metal acetylacetonato complex, or a metal alkoxide having an organic group with 6 or more carbon atoms) in a solvent to provide a state of solution, applying the solution onto a substrate, drying the solution, and subjecting the resultant substrate to irradiation with a laser light of a 400 nm or shorter wavelength, to form a metal oxide on the substrate. According to this method a metal oxide can be produced without applying a heat treatment at a high temperature to the degree adopted in the conventionally known application thermal decomposition method. A minute pattern can be obtained by irradiation with a laser light according to a pattern shape or through a mask pattern.