公开(公告)号：JPH08133900A

公开(公告)日：1996-05-28

申请号：JP30169794

申请日：1994-11-11

Applicant: AGENCY IND SCIENCE TECHN ,  OYO KEISOKU KENKYUSHO KK

Inventor： KONUMA KAZUO ,  KAMEYAMA TETSUYA ,  KUWAJIMA SHIGEZUMI ,  NAKAMURA TORU

IPC: C30B30/00

Abstract: PURPOSE: To efficiently obtain crystal of a desired shape and to actualize control of stable crystal growth through control of real time, by providing a means for measuring the shape of crystal face in a non-contact state, a means for controlling the growth rate of space crystal face at speeds different in terms of partial space, a means for calculating a control value so as to make space growth rate constant from height information of the measured crystal face. CONSTITUTION: A space growth rate of crystal face is measured by division ability of 1nm by a real time phase shift interference meter. The temperature and phase transition of crystal face are partially controlled by irradiation of the crystal face with light rays or patterned light having an intensity distribution as a means for selectively controlling the crystal face. The control of crystal face is solved by a means for providing an electric field with a distribution by plural electrodes. High information of plural points are effectively subjected to data treatment in a stable form as the growth rate of the crystal face. The crystal face as a target is directly observed and the growth rate of part of crystal is selectively controlled based on the observed data.

公开(公告)号：JPH07198319A

公开(公告)日：1995-08-01

申请号：JP34947493

申请日：1993-12-28

Applicant: AGENCY IND SCIENCE TECHN ,  OYO KEISOKU KENKYUSHO KK

Inventor： KONUMA KAZUO ,  KAMEYAMA TETSUYA ,  KUWAYAMA SHIGEZUMI ,  NAKAMURA TORU

IPC: G01B9/02 ,  G01B11/24 ,  G01B11/245 ,  G01N21/45

Abstract: PURPOSE:To form interference fringes without optical noise stably at a high speed by inserting a moving diffusing plate into an optical path, imparting minute change on interference light, casting the light on a body to be measured, and averaging the reflected light in time. CONSTITUTION:Irregular fluctuation is incessantly imparted on laser light 2 by the minute irregular patterns of the surface of a diffusing plate 20, which is linked to a rotating means 22, and the laser light 2 is cast or a measuring surface 12. The amplitude and the phase of the reflected light from the measuring surface 12 are transmitted through a 1/4-wavelength plate 6C, and the light is converted into the right and left circularly polarized light. The light is split into three beams with a splitting optical system 4. The light beams are transmitted through polarizing plates 16A-16C and become interference fringes. The images of the interference fringes are picked up with TV cameras 18A-18C and inputted into a signal. processing device 30. The phase difference of the circularly polarized light beams is measured. Minute optical fluctuation is imparted on the interference fringes with the diffusing plate 20. The interference fringes are integrated with the photoelectric conversion elements of the cameras 18A-18C at one field unit Therefore, speckle noises caused by dust and the like attached on the surface of glass can be readily removed. Thus, the stabilized interference fringes are obtained.

公开(公告)号：JP2001084656A

公开(公告)日：2001-03-30

申请号：JP25764999

申请日：1999-09-10

Applicant: AGENCY IND SCIENCE TECHN

Inventor： NAKAMURA TORU ,  MATSUMOTO MUTSUYOSHI

IPC: B82B3/00 ,  G11B9/14

Abstract: PROBLEM TO BE SOLVED: To easily obtain a recording medium which has recording density of a nanometer(nm) unit, large capacity and high density and is smooth and stable. SOLUTION: In the recording medium in which a recording layer is provided on an electrically conductive substrate, the recording layer is made of a self- organizing film formed by interaction between the substrate and an organic low molecular compound. As the organic low molecular compound, a compound, which has at least a functional group forming a network of a hydrogen-bonding type and a functional group forming a bond with an electrode layer substrate in the molecule, is preferably used and in particular, thiomalic acid or 3- mercaptopropionic acid is preferably used.