公开(公告)号：CA2303549C

公开(公告)日：2004-05-25

申请号：CA2303549

申请日：2000-03-30

Applicant: AGENCY IND SCIENCE TECHN

Inventor： WATANABE AKIO ,  KUMAGAI TOSHIYA ,  TSUCHIYA TETSUO ,  IMAI YOJI ,  YAMAGUCHI IWAO ,  MANABE TAKAAKI ,  NIINO HIROYUKI ,  YABE AKIRA ,  MIZUTA SUSUMU

IPC: B05D3/06 ,  C23C18/14 ,  C23C18/16 ,  H01L39/24

Abstract: There is disclosed a method for producing a metal oxide, which comprises the steps of: dissolving a metal organic compound (e.g. a metal organic acid salt, a metal acetylacetonato complex, and a metal alkoxide having an organic group with 6 or more carbon atoms) in a solvent to provides a state of solution, applying the solution onto a substrate, drying the solution, and subjecting the resultant substrate to irradiation with a laser light of a 400 nm or less wavelength, to form a metal oxide on the substrate. According to that method, a metal oxide can be produced without applying a heat treatment at a high temperature of the degree adopted in the conventionally known application thermal decomposition method.

公开(公告)号：CA2303549A1

公开(公告)日：2000-11-17

申请号：CA2303549

申请日：2000-03-30

Applicant: AGENCY IND SCIENCE TECHN

Inventor： KUMAGAI TOSHIYA ,  YABE AKIRA ,  MANABE TAKAAKI ,  NIINO HIROYUKI ,  MIZUTA SUSUMU ,  IMAI YOJI ,  TSUCHIYA TETSUO ,  YAMAGUCHI IWAO ,  WATANABE AKIO

IPC: B05D3/06 ,  C23C18/14 ,  C23C18/16 ,  H01L39/24

Abstract: There is disclosed a method for producing a metal oxide, which comprises the steps of: dissolving a metal organic compound (e.g. a metal organic acid salt, a metal acetylacetonato complex, and a metal alkoxide having an organic group with 6 or more carbon atoms) in a solvent to provides a state of solution, applying the solution onto a substrate, drying the solution, and subjecting the resultant substrate to irradiation with a laser light of a 400 nm or less wavelength, to form a metal oxide on the substrate. According to that method, a metal oxide can beg produced without applying a heat treatment at a high temperature of the degree adopted in the conventionally known application thermal decomposition method.

公开(公告)号：AU742356B2

公开(公告)日：2002-01-03

申请号：AU2518900

申请日：2000-03-31

Applicant: AGENCY IND SCIENCE TECHN

Inventor： MIZUTA SUSUMU ,  TSUCHIYA TETSUO ,  WATANABE AKIO ,  IMAI YOJI ,  YAMAGUCHI IWAO ,  KUMAGAI TOSHIYA ,  MANABE TAKAAKI ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: B05D3/06 ,  C23C18/14 ,  C23C18/16 ,  H01L39/24

公开(公告)号：AU2518900A

公开(公告)日：2000-11-23

申请号：AU2518900

申请日：2000-03-31

Applicant: AGENCY IND SCIENCE TECHN

Inventor： MIZUTA SUSUMU ,  TSUCHIYA TETSUO ,  WATANABE AKIO ,  IMAI YOJI ,  YAMAGUCHI IWAO ,  KUMAGAI TOSHIYA ,  MANABE TAKAAKI ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: B05D3/06 ,  C23C18/14 ,  C23C18/16 ,  H01L39/24

公开(公告)号：JP2001031417A

公开(公告)日：2001-02-06

申请号：JP30864499

申请日：1999-10-29

Applicant: AGENCY IND SCIENCE TECHN

Inventor： MIZUTA SUSUMU ,  TSUCHIYA TETSUO ,  WATANABE AKIO ,  IMAI YOJI ,  YAMAGUCHI IWAO ,  KUMAGAI TOSHIYA ,  MANABE TAKAAKI ,  NIINO HIROYUKI ,  YABE AKIRA

IPC: C01G1/02 ,  C08F2/48 ,  C23C18/12 ,  C23C18/14

Abstract: PROBLEM TO BE SOLVED: To provide a method for producing a metal oxide without carrying out a high temperature thermal treatment which has been known as a coating thermal decomposition method. SOLUTION: This method for producing a metal oxide comprises dissolving a metal organic compound (a metal organic acid salt, a metal acetylacetonate complex, a metal alkoxide having a >=6C organic group) in a solvent, coating the obtained solution on a substrate, drying the coated solution, and then irradiating the formed coating film with laser light having a wavelength of