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公开(公告)号：EP0236128A3
公开(公告)日：1988-09-21
申请号：EP87301856
申请日：1987-03-03
Applicant: AGENCY OF INDUSTRIAL SCIENCE AND TECHNOLOGY
Inventor： NAITO, HIROSHI , TAKAHASHI, HIDEMI , KUMURA, MINORU , SANO, REIJI
IPC: G01S7/02 , G01J5/02 , G01J5/06 , G01J5/60 , G01S7/03 , G01S7/48 , G01S17/02 , G01V8/12 , G01J5/04
CPC classification number: G01J5/06 , G01J2005/604
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