公开(公告)号：WO1995031859A1

公开(公告)日：1995-11-23

申请号：PCT/US1995005472

申请日：1995-05-03

Applicant: ALLIEDSIGNAL INC.

Inventor： ALLIEDSIGNAL INC. ,  PETRI, Fred

IPC: H03H09/21

CPC classification number: H03H9/21 ,  G01L1/106 ,  G01P15/097

Abstract: A double-ended tuning fork (DETF) is formed from two vibrating beams joined together at each end, having a thickness t, a width w, a length L and a vibrating beam length m. The dimensional ratios t/w and L/m for the DETF are selected according to a relatively more accurate spurious mode map based upon detailled finite element calculations at specific dimensional ratios for t/w and L/m. The results of the finite element analysis are fit by way of a least-squared polynominal over the entire dimensional range of interest. The results of the finite element analysis for the spurious modes provide differences of up to fourteen percent (14 %) relative to the spurious mode map based on simple beam theory. In addition, the spurious mode map in accordance with the present invention accounts for the use of symmetric in the base region outriggers in the base region of the DETF which increases the mechanical Q of the DETF.

Abstract translation: 双端音叉（DETF）由两端连接的两个振动梁形成，具有厚度t，宽度w，长度L和振动梁长度m。 根据基于t / w和L / m的特定尺寸比例下的有限元计算的相对更准确的假模态图来选择DETF的尺寸比t / w和L / m。 有限元分析的结果通过在感兴趣的整个尺寸范围内的最小二乘多项式拟合。 基于简单波束理论，伪模式的有限元分析结果相对于伪模式图提供了高达14％（14％）的差异。 此外，根据本发明的杂散模式图表示在DETF的基极区域中的基极区域外支腿中使用对称的增加DETF的机械Q的使用。

公开(公告)号：WO1997047978A1

公开(公告)日：1997-12-18

申请号：PCT/US1997010325

申请日：1997-06-13

Applicant: ALLIEDSIGNAL INC.

Inventor： ALLIEDSIGNAL INC. ,  PETRI, Fred

IPC: G01P15/10

CPC classification number: G01R33/028 ,  E21B47/02 ,  E21B47/022 ,  E21B47/02232 ,  G01C17/30 ,  G01P15/097

Abstract: A magnetometer is integrated with a miniature vibrating beam accelerometer fabricated out of silicon on a common substrate. Dual pendulum-DETF force sensing accelerometers have integrated conductor coils on the pendulums that circulate alternating current to cause an additional pendulum motion also sensed by the DETF transducers for sensing local earth magnetic field. The integrated magnetic and acceleration sensing is used for each of three reference axes in a triaxial inclinometer magnetometer for borehole drill steering and surveying.

Abstract translation: 磁力仪与在公共基板上由硅制成的微型振动梁加速度计集成。 双摆DETF力感测加速度计在摆锤上具有集成的导体线圈，其循环交流电流，以产生也由DETF换能器检测到的附加摆锤运动，以感测局部地磁场。 在三轴倾角计磁力计中用于钻孔转向和测量的三个参考轴中的每一个的集成磁和加速度感测。

公开(公告)号：WO1997047979A1

公开(公告)日：1997-12-18

申请号：PCT/US1997010451

申请日：1997-06-13

Applicant: ALLIEDSIGNAL INC.

Inventor： ALLIEDSIGNAL INC. ,  PETRI, Fred

IPC: G01P15/10

CPC classification number: G01R33/028 ,  E21B47/02 ,  E21B47/022 ,  E21B47/02232 ,  G01C17/30 ,  G01P15/097

Abstract: A magnetometer is integrated with a miniature vibrating beam accelerometer fabricated out of silicon on a common susbtrate. Dual pendulum-DETF force sensing accelerometers have integrated conductor coils on the pendulums that circulate alternating current to cause an additional pendulum motion also sensed by the DETF transducers for sensing local earth magnetic field. The integrated magnetic and acceleration sensing is used for each of three reference axes in a triaxial inclinometer magnetometer for borehole drill steering and surveying.

Abstract translation: 磁力计集成在一个普通的悬挂物上由硅制成的微型振动梁加速度计。 双摆DETF力感测加速度计在钟摆上具有集成的导体线圈，其循环交流电流以产生也由DETF换能器检测到的附加摆锤运动，用于感测局部地球磁场。 在三轴倾角计磁力计中，用于钻孔转向和测量的三个参考轴中的每一个集成磁和加速度感测。

公开(公告)号：WO1997047944A1

公开(公告)日：1997-12-18

申请号：PCT/US1997003702

申请日：1997-03-17

Applicant: ALLIEDSIGNAL INC.

Inventor： ALLIEDSIGNAL INC. ,  PETRI, Fred ,  HELSEL, Mark, P.

IPC: G01C19/56

CPC classification number: G01C19/5719

Abstract: An open top box structure is micromachined on a base, such as a crystalline silicon substrate, and drive and sensing devices are fabricated on the same substrate. Output transducers sense Coriolis force changes by processing signals representing force components at the corners of the vibrating box structure as it is rotated to yield angular rate measurement.

Abstract translation: 开放式顶盒结构被微机械加工在基底上，例如晶体硅衬底，并且驱动和感测装置制造在相同的衬底上。 输出传感器通过处理表示振动盒结构的角部处的力分量的信号来感测科里奥利力的变化，因为它被旋转以产生角速率测量。

公开(公告)号：EP0759232A1

公开(公告)日：1997-02-26

申请号：EP95918366.0

申请日：1995-05-03

Applicant: AlliedSignal Inc.

Inventor： PETRI, Fred

IPC: G01L1 ,  G01P15 ,  H03H9

CPC classification number: H03H9/21 ,  G01L1/106 ,  G01P15/097

Abstract: A double-ended tuning fork (DETF) is formed from two vibrating beams joined together at each end, having a thickness t, a width w, a length L and a vibrating beam length m. The dimensional ratios t/w and L/m for the DETF are selected according to a relatively more accurate spurious mode map based upon detailled finite element calculations at specific dimensional ratios for t/w and L/m. The results of the finite element analysis are fit by way of a least-squared polynominal over the entire dimensional range of interest. The results of the finite element analysis for the spurious modes provide differences of up to fourteen percent (14 %) relative to the spurious mode map based on simple beam theory. In addition, the spurious mode map in accordance with the present invention accounts for the use of symmetric in the base region outriggers in the base region of the DETF which increases the mechanical Q of the DETF.

公开(公告)号：EP0904522A1

公开(公告)日：1999-03-31

申请号：EP97915895.0

申请日：1997-03-17

Applicant: AlliedSignal Inc.

Inventor： PETRI, Fred ,  HELSEL, Mark, P.

IPC: G01C19 ,  G01P9

CPC classification number: G01C19/5719

Abstract: An open top box structure is micromachined on a base, such as a crystalline silicon substrate, and drive and sensing devices are fabricated on the same substrate. Output transducers sense Coriolis force changes by processing signals representing force components at the corners of the vibrating box structure as it is rotated to yield angular rate measurement.