公开(公告)号：WO2005019785A2

公开(公告)日：2005-03-03

申请号：PCT/US2004025825

申请日：2004-08-10

Applicant: ANALOG DEVICES INC ,  O'DOWD JOHN ,  MCCARTNEY DAMIEN JOSEPH ,  HUNT WILLIAM ,  HYNES EAMON ,  WYNNE JOHN M ,  CROWLEY PATRICK ,  MARTIN JOHN R

Inventor： O'DOWD JOHN ,  MCCARTNEY DAMIEN JOSEPH ,  HUNT WILLIAM ,  HYNES EAMON ,  WYNNE JOHN M ,  CROWLEY PATRICK ,  MARTIN JOHN R

IPC: G01L20060101 ,  G01L9/00 ,  G01L9/12 ,  G01L13/02 ,  G01L

CPC classification number: G01L9/0072 ,  G01L9/0073 ,  G01L9/0075 ,  G01L13/025 ,  G01L19/0076 ,  H01L2224/48091 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the first diaphragm, and a second conductive layer on the plate, the first and second conductive layers being the electrodes of a capacitor whose capacitance varies with the position of the diaphragm relative to the plate.

Abstract translation: 一种电容式传感器，包括具有密封空腔的壳体，腔体中的板，形成腔的一部分并与板隔开的膜片，第一膜片上的导电层和板上的第二导电层， 第一和第二导电层是电容器的电极，其电容随着隔膜相对于板的位置而变化。

公开(公告)号：EP1682859A4

公开(公告)日：2007-08-22

申请号：EP04780631

申请日：2004-08-10

Applicant: ANALOG DEVICES INC

Inventor： O'DOWD JOHN ,  MCCARTNEY DAMIEN JOSEPH ,  HUNT WILLIAM ,  HYNES EAMON ,  WYNNE JOHN M ,  CROWLEY PATRICK ,  MARTIN JOHN R

IPC: G01L1/04 ,  G01L20060101 ,  G01L1/12 ,  G01L9/00 ,  G01L9/12 ,  G01L13/00 ,  G01L13/02 ,  G01L17/00

CPC classification number: G01L9/0072 ,  G01L9/0073 ,  G01L9/0075 ,  G01L13/025 ,  G01L19/0076 ,  H01L2224/48091 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the first diaphragm, and a second conductive layer on the plate, the first and second conductive layers being the electrodes of a capacitor whose capacitance varies with the position of the diaphragm relative to the plate.

Abstract translation: 一种电容式传感器，包括具有密封空腔的壳体，腔体中的板，形成腔的一部分并与板隔开的膜片，第一膜片上的导电层和板上的第二导电层， 第一和第二导电层是电容器的电极，其电容随着隔膜相对于板的位置而变化。