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公开(公告)号：DK3130407T3
公开(公告)日：2021-02-01
申请号：DK15180392
申请日：2015-08-10
Applicant: APATOR MIITORS APS
Inventor： BJERRING LINDBALLE THUE
IPC: H01L41/313 , B06B1/06 , G01F1/66
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公开(公告)号：LT3130407T
公开(公告)日：2020-12-28
申请号：LT15180392
申请日：2015-08-10
Applicant: APATOR MIITORS APS
Inventor： BJERRING LINDBALLE THUE
IPC: H01L41/313 , B06B1/06 , G01F1/66
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