公开(公告)号：WO2015109273A4

公开(公告)日：2015-07-23

申请号：PCT/US2015/011883

申请日：2015-01-18

Applicant: APPLE INC.

Inventor： GERSON, Yuval ,  CHAYAT, Naftali ,  AXELROD, Noel ,  SHPUNT, Alexander

IPC: B81B3/00 ,  G02B26/08 ,  G02B26/10

Abstract: A scanning device (64, 220, 230) includes a substrate (68), which is etched to define an array of two or more parallel rotating members (102) and a gimbal (72, 232) surrounding the rotating members. First hinges (106, 234) connect the gimbal to the substrate and defining a first axis of rotation, about which the gimbal rotates relative to the substrate. Second hinges (74) connect the rotating members to the support and defining respective second, mutually-parallel axes of rotation of the rotating members relative to the support, which are not parallel to the first axis.

公开(公告)号：EP2828833B1

公开(公告)日：2017-03-08

申请号：EP13764401.9

申请日：2013-03-13

Applicant: APPLE INC.

Inventor： CHAYAT, Naftali ,  GERSON, Yuval

IPC: G06T17/00 ,  G02B26/10

CPC classification number: G01B11/24 ,  G01S7/4817 ,  G01S17/10 ,  G01S17/42 ,  G01S17/89 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105 ,  H01L21/50

公开(公告)号：EP2828833A1

公开(公告)日：2015-01-28

申请号：EP13764401.9

申请日：2013-03-13

Applicant: APPLE INC.

Inventor： CHAYAT, Naftali ,  GERSON, Yuval

IPC: G06T17/00 ,  G02B26/10

CPC classification number: G01B11/24 ,  G01S7/4817 ,  G01S17/10 ,  G01S17/42 ,  G01S17/89 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105 ,  H01L21/50

Abstract: An optical scanning device (64) includes a substrate (68), which is etched to define an array (100) of two or more parallel micromirrors (102) and a support (72) surrounding the micromirrors. Respective spindles (106) connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members (108) are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.