公开(公告)号：WO2021247573A1

公开(公告)日：2021-12-09

申请号：PCT/US2021/035247

申请日：2021-06-01

Applicant: APPLIED MATERIALS, INC.

Inventor： CRIMINALE, Phillip A. ,  GUO, Zhiqiang ,  MYLES, Andrew ,  PEREZ-GUZMAN, Martin

IPC: H01L21/66 ,  H01L21/67 ,  H02J50/00 ,  H02J50/10 ,  G05B19/418 ,  G05B13/024 ,  H01L21/67248 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/68707 ,  H01L21/68742 ,  H01L22/34 ,  H05K1/183 ,  H05K2201/10151 ,  H05K2201/10371

Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.

公开(公告)号：WO2021247586A1

公开(公告)日：2021-12-09

申请号：PCT/US2021/035261

申请日：2021-06-01

Applicant: APPLIED MATERIALS, INC.

Inventor： CRIMINALE, Phillip A. ,  GUO, Zhiqiang ,  KRAUS, Philip A. ,  MYLES, Andrew ,  PEREZ-GUZMAN, Martin

IPC: H01L21/66 ,  H01L21/67 ,  H01J37/32 ,  G05B19/418 ,  H02J7/00 ,  H02J50/80 ,  H02J50/10 ,  H01L21/67253 ,  H05K1/181 ,  H05K2201/10015 ,  H05K2201/10151 ,  H05K5/03 ,  H05K5/069 ,  H05K7/1427

Abstract: A diagnostic disc includes a disc-shaped body having raised walls that encircle the interior of the disc-shaped body and at least one protrusion extending outwardly from the disc-shaped body. The raised walls of the disc-shaped body define a cavity of the disc-shaped body. A non-contact sensor is attached to each of the at least one protrusion. A a printed circuit board (PCB) is positioned within the cavity formed on the disc-shaped body. A vacuum and high temperature tolerant power source is disposed on the PCB along with a wireless charger and circuitry that is coupled to each non-contact sensor and includes at least a wireless communication circuit and a memory. A cover is positioned over the cavity of the disc-shaped body and shields at least a portion of the PCB, circuitry, power source, and wireless charger within the cavity from an external environment.

公开(公告)号：WO2020252147A1

公开(公告)日：2020-12-17

申请号：PCT/US2020/037208

申请日：2020-06-11

Applicant: APPLIED MATERIALS, INC.

Inventor： VISHWANATH, Yogananda Sarode ,  CRIMINALE, Phillip A.

IPC: H01J37/32

Abstract: A diagnostic disc includes a disc body having a sidewall around a circumference of the disc body and at least one protrusion extending outwardly from a top of the sidewall. A non-contact sensor is attached to an underside of each of the at least one protrusion. A a printed circuit board (PCB) is positioned within an interior formed by the disc body. Circuitry is disposed on the PCB and coupled to each non-contact sensor, the circuitry including at least a wireless communication circuit, a memory, and a battery. A cover is positioned over the circuitry inside of the sidewall, wherein the cover seals the circuitry within the interior formed by the disc body from an environment outside of the disc body.

公开(公告)号：WO2022265767A1

公开(公告)日：2022-12-22

申请号：PCT/US2022/028979

申请日：2022-05-12

Applicant: APPLIED MATERIALS, INC.

Inventor： MYLES, Andrew ,  SCHMID, Andreas ,  CRIMINALE, Phillip A. ,  BABAYAN, Steven E.

IPC: H01L21/67 ,  H01L21/68 ,  H01L21/687 ,  H01J37/32 ,  G01B11/02

Abstract: Examples disclosed herein are directed to a method and apparatus for determining a position of a ring within a process kit. In one example, a sensor assembly for a substrate processing chamber is provided. The sensor assembly includes a housing having a top surface, a bottom surface opposite the top surface, and a plurality of sidewalls connecting the top surface to the bottom surface. The housing also has a recess in the top surface, the recess forming an interior volume within the housing. The sensory assembly includes a bias member, and a contact member disposed on the bias member. The bias member and contact member are disposed within the recess. A sensor is configured to detect a displacement of the contact member. The displacement of the contact member corresponds to a relative position of an edge ring.