公开(公告)号：AU5773200A

公开(公告)日：2001-01-30

申请号：AU5773200

申请日：2000-06-27

Applicant: APPLIED MATERIALS INC

Inventor： INNES ROBERT ,  ECKES WILLIAM A

IPC: G01B11/26 ,  G01B11/27

Abstract: A laser beam or other parallel light beam divides at a beamsplitter into sample and reference beams. The sample beam reflects from a reflective surface back to the beamsplitter, and the reference beam reflects from a retroreflector back to the beamsplitter. The beams are then directed into a telescope. The angle between sample and reference beams at the telescope is proportional to the angle between the laser beam and the normal to the reflective surface. The telescope collects both sample beam and reference beam and transforms each beam into a sharply defined point image. The lateral separation between the two point images is proportional to the magnification of the telescope and to the angle formed at the telescope between the sample beam and the reference beam. If the reflective surface is accurately aligned relative to the laser beam, then the two point images are substantially superposed on one another. Alignment is performed by adjusting the orientation of the reflective surface, until the lateral separation between the two point images reaches zero or a predetermined value.

公开(公告)号：WO2007041059A3

公开(公告)日：2009-04-09

申请号：PCT/US2006037224

申请日：2006-09-25

Applicant: APPLIED MATERIALS INC

Inventor： JASINSKI THOMAS ,  WINKLER DIETER ,  ECKES WILLIAM A

IPC: A61N5/00

CPC classification number: H01J37/141 ,  H01J2237/002

Abstract: We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.

Abstract translation: 我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。 该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果，而且提供了改善的传热均匀性。 这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内，其中电流范围为约100纳安 - 约1000纳帕。 使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合，其提供对电磁透镜线圈的均匀冷却，不仅能够控制带电粒子束的光轴，而且还提供机械稳定性 带电粒子束柱。

公开(公告)号：EP1943658A4

公开(公告)日：2010-06-16

申请号：EP06815311

申请日：2006-09-25

Applicant: APPLIED MATERIALS INC

Inventor： JASINSKI THOMAS ,  WINKLER DIETER ,  ECKES WILLIAM A

IPC: H01J1/50

CPC classification number: H01J37/141 ,  H01J2237/002