公开(公告)号：DE1539659A1

公开(公告)日：1969-12-18

申请号：DEA0053727

申请日：1966-10-11

Applicant: APPLIED RES LAB INC

Inventor： JAKOB LIEBL HELMUT

IPC: G01Q10/00 ,  G01Q30/06 ,  H01J29/58 ,  H01J37/05 ,  H01J37/252 ,  H01J37/256 ,  H01J49/02 ,  H01J49/14 ,  H01J49/20 ,  H01J49/28 ,  H01J49/30 ,  H01J49/32 ,  H01J39/34

Abstract: 1,145,107. Ion beam tubes; particle spectrometers. APPLIED RESEARCH LABORATORIES Inc. 4 Oct., 1966 [11 Oct., 1965(3)], No. 44183/66. Heading H1D. An ion beam microprobe analyzer has a wedgeshaped magnetic lens 116 for filtering out undesired ions and a unipotential electrostatic lens 118 for concentrating the beam directed on to the specimen 124. An additional concentrating unipotential lens 122 may be provided and the beam is scanned over a selected area of the specimen by pairs of deflection plates 126. Ions emitted from the specimen are directed into a double-focusing mass spectrometer 130 in which a unipotential lens 132 is provided in advance of the electrostatic analyser 134, as described in Specification 1,145,108, in order to increase the acceptance angle. An auxiliary pair of deflection plates 150 is provided at the entrance of the spectrometer in order to compensate for movement of the cross-over at the exit aperture 142 due to the effect of scanning the primary ion beam over the specimen. An electron gun 152 produces an electron beam for ionizing neutral particles emitted from the specimen and so to increase the effective ion emission from the specimen.

公开(公告)号：DE1539660A1

公开(公告)日：1970-04-09

申请号：DEA0053728

申请日：1966-10-11

Applicant: APPLIED RES LAB INC

Inventor： JAKOB LIEBL HELMUT

IPC: G01Q10/00 ,  G01Q30/06 ,  H01J29/58 ,  H01J37/05 ,  H01J37/252 ,  H01J37/256 ,  H01J49/02 ,  H01J49/14 ,  H01J49/20 ,  H01J49/28 ,  H01J49/30 ,  H01J49/32 ,  H01J39/34

Abstract: 1,145,107. Ion beam tubes; particle spectrometers. APPLIED RESEARCH LABORATORIES Inc. 4 Oct., 1966 [11 Oct., 1965(3)], No. 44183/66. Heading H1D. An ion beam microprobe analyzer has a wedgeshaped magnetic lens 116 for filtering out undesired ions and a unipotential electrostatic lens 118 for concentrating the beam directed on to the specimen 124. An additional concentrating unipotential lens 122 may be provided and the beam is scanned over a selected area of the specimen by pairs of deflection plates 126. Ions emitted from the specimen are directed into a double-focusing mass spectrometer 130 in which a unipotential lens 132 is provided in advance of the electrostatic analyser 134, as described in Specification 1,145,108, in order to increase the acceptance angle. An auxiliary pair of deflection plates 150 is provided at the entrance of the spectrometer in order to compensate for movement of the cross-over at the exit aperture 142 due to the effect of scanning the primary ion beam over the specimen. An electron gun 152 produces an electron beam for ionizing neutral particles emitted from the specimen and so to increase the effective ion emission from the specimen.