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    METHOD FOR ELECTRICALLY ISOLATING LARGE AREA ELECTRODE BODIES
    1.
    发明申请
    METHOD FOR ELECTRICALLY ISOLATING LARGE AREA ELECTRODE BODIES 审中-公开
    用于电气分离大面积电极体的方法

    公开(公告)号：WO1988006803A1

    公开(公告)日：1988-09-07

    申请号：PCT/JP1988000211

    申请日：1988-02-26

    Applicant: ASAHI GLASS COMPANY LTD. ,  GLASSTECH SOLAR, INC.

    Inventor： ASAHI GLASS COMPANY LTD. ,  GLASSTECH SOLAR, INC. ,  KOBAYASHI, Shigeyoshi ,  McMASTER, Harold, A. ,  MUHL, Stephen

    IPC: H01L21/48

    CPC classification number: H01L31/022425 ,  H01L21/4846 ,  H01L31/046 ,  H05K3/143 ,  Y02E10/50

    Abstract: Method for electrically isolating large area electrode bodies to facilitate cascade interconnection of semiconductor bodies which may be deposited afterwards includes applying a maskant in a preselected pattern onto a substrate, depositing a conformal layer of an electrically conductive electrode material atop the patterned maskant and removing the maskant and the electrode material deposited thereon by dissolving in a solvent which is substantially chemically inert with respect to subsequently deposited materials to expose at least portions of the substrate and electrically isolate the remaining portions of the electrode material so that selective electrical interconnections may be made between electrically isolated electrode portions. This method substantially eliminates the need for laser or mechanical scribing of semiconductor bodies on a large area substrate.

    Abstract translation: 用于电隔离大面积电极体以促进随后可能沉积的半导体主体的级联互连的方法包括以预先选择的图案将掩蔽剂施加到衬底上，在图案化掩模剂顶部沉积导电电极材料的共形层并除去掩蔽剂 以及通过溶解在相对于随后沉积的材料基本上化学惰性的溶剂中沉积的电极材料，以暴露至少部分基底并电绝缘电极材料的剩余部分，使得可以在电 隔离电极部分。 该方法基本上消除了对大面积衬底上的半导体本体的激光或机械刻划的需要。

    MODULAR CONTINUOUS VAPOR DEPOSITION SYSTEM
    2.
    发明申请
    MODULAR CONTINUOUS VAPOR DEPOSITION SYSTEM 审中-公开
    模块化连续蒸发沉积系统

    公开(公告)号：WO1990009466A1

    公开(公告)日：1990-08-23

    申请号：PCT/US1990000682

    申请日：1990-02-06

    Applicant: GLASSTECH SOLAR, INC.

    Inventor： GLASSTECH SOLAR, INC. ,  MADAN, Arun ,  VON ROEDERN, Bolko

    IPC: C23C16/50

    CPC classification number: H01L21/67173 ,  C23C16/54 ,  H01L21/67207 ,  H01L31/206 ,  Y02E10/50 ,  Y02P70/521

    Abstract: A modular continuous vapor deposition system (10) for the fabrication of semiconductor devices having a plurality of deposition modules isolated from each other by isolation modules which prevent the cross contamination of the different processing gases used in the deposition modules. Each of the deposition modules has a flow of a decomposable processing gas therethrough at a desired pressure, and means for generating a continuous glow discharge. The glow discharge decomposes the processing gas to deposit a layer of amorphous semiconductor material on the discrete substrate sheets as they are transported through each of the deposition modules. A plurality of gate valves (44) effectively seal the interfaces between adjacent modules to isolate them from their immediate neighbors and are opened in a predetermined sequence to allow the substrate sheets to be transported from one module to the next. The isolation modules are connected to a vacuum source (64) and a back-fill gas source (58). A control (68) coordinates the activation of the gate valves, the vacuum source and the back-fill gas source so that the substrate sheets can be uninterruptedly transported through the system while maintaining the glow discharge continuous and gas pressure in each deposition module at the desired pressure.

    Abstract translation: 一种用于制造半导体器件的模块化连续气相沉积系统（10），其具有通过隔离模块彼此隔离的多个沉积模块，所述隔离模块防止在沉积模块中使用的不同处理气体的交叉污染。 每个沉积模块具有在所需压力下通过其中的可分解处理气体的流动，以及用于产生连续辉光放电的装置。 辉光放电分解处理气体，以便在分离的衬底片材上沉积非晶半导体材料层，因为它们被输送通过每个沉积模块。 多个闸阀（44）有效地密封相邻模块之间的界面，以将它们与其近邻相隔开，并以预定的顺序打开，以允许基板被从一个模块输送到下一个模块。 隔离模块连接到真空源（64）和回填气源（58）。 控制器（68）协调闸阀，真空源和回填气源的激活，使得基板可以不间断地输送通过系统，同时保持辉光放电连续，每个沉积模块中的气体压力在 所需的压力。

    SOLAR CELL FABRICATION METHOD AND SOLAR CELL MADE THEREBY
    3.
    发明申请
    SOLAR CELL FABRICATION METHOD AND SOLAR CELL MADE THEREBY 审中-公开
    太阳能电池制造方法和太阳能电池制造

    公开(公告)号：WO1989004062A1

    公开(公告)日：1989-05-05

    申请号：PCT/US1988003871

    申请日：1988-10-28

    Applicant: GLASSTECH SOLAR, INC.

    Inventor： GLASSTECH SOLAR, INC. ,  JIANPING, Xi ,  MADAN, Arun

    IPC: H01L31/04

    CPC classification number: H01L31/022433 ,  H01L31/022425 ,  Y02E10/50

    Abstract: A solar cell fabrication method and solar cell (10) made by the method wherein a grid of point electrical connections (22) is made to a transparent first electrode layer (14) of the cell through a layer of a-Si semiconductor material (16) which is sandwiched between the first electrode layer and a second back electrode layer (18). A dielectric layer (20) electrically insulates the back electrode layer and the grid of point electrical connections. An electrically conducting network (32) is deposited on the dielectric layer and electrically interconnects the grid of point electrical connections. The resulting cell has a relatively low active area loss and a relatively low electrical power loss due to the electrical connections in the cell.

    Abstract translation: 一种太阳能电池制造方法和太阳能电池（10），其特征在于，通过a-Si半导体材料层（16）将点电连接网格（22）制成到电池的透明第一电极层（14） ）夹在第一电极层和第二背面电极层（18）之间。 电介质层（20）使背电极层和点电连接网格电绝缘。 导电网络（32）沉积在电介质层上并电连接点电连接网格。 由于电池中的电连接，所得的电池具有相对低的有功面积损耗和相对低的电功率损耗。

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