公开(公告)号：WO2022144144A1

公开(公告)日：2022-07-07

申请号：PCT/EP2021/084066

申请日：2021-12-02

Applicant: ASML HOLDING N.V. ,  ASML NETHERLANDS B.V.

Inventor： ALIKHAN, Abdullah ,  UITTERDIJK, Tammo ,  ENGELEN, Johannes, Bernardus, Charles ,  KAMIENIECKI, Daniel ,  VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus ,  POIESZ, Thomas ,  LEVASIER, Leon, Martin ,  OVERKAMP, Jim, Vincent ,  PIJNENBURG, Johannes, Adrianus, Cornelis, Maria ,  VAN BERKEL, Koos ,  DIGUIDO, Gregory, James ,  SOCCI, JR., Anthony, C. ,  SIGAL, Iliya ,  LOMANS, Bram, Antonius, Gerardus ,  HABETS, Michel, Ben, Isel

IPC: G03F7/20 ,  H01L21/683 ,  H01L21/687

Abstract: Systems, apparatuses, and methods are provided for manufacturing a substrate table. An example method can include forming a vacuum sheet including a plurality of vacuum connections and a plurality of recesses configured to receive a plurality of burls disposed on a core body for supporting an object such as a wafer. Optionally, at least one burl can be surrounded, partially or wholly, by a trench. The example method can further include using the vacuum sheet to mount the core body to an electrostatic sheet including a plurality of apertures configured to receive the plurality of burls. Optionally, the example method can include using the vacuum sheet to mount the core body to the electrostatic sheet such that the plurality of recesses of the vacuum sheet line up with the plurality of burls of the core body and the plurality of apertures of the electrostatic sheet.