公开(公告)号：US20240280907A1

公开(公告)日：2024-08-22

申请号：US18567053

申请日：2022-04-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Hasret ERCISLI ,  Alina-Ionela DOBAN ,  Norbertus Josephus Martinus VAN DEN NIEUWELAAR ,  Jean-Philippe Xavier VAN DAMME ,  Frederik Eduard DE JONG

IPC: G03F7/20 ,  H01L21/66

CPC classification number: G03F7/2002 ,  H01L22/20

Abstract: A method for determining thermally-induced deformation of a structure in a lithographic apparatus, the method including: obtaining timing data for a structure in a lithographic apparatus, wherein the timing data includes timing data for the current state of the structure and timing history data that includes timing data for at least one previous state of the structure; and using one or more models to determine thermally-induced deformation data for the structure in dependence on the timing history data and the timing data for the current state of the structure.