公开(公告)号：WO2016139022A1

公开(公告)日：2016-09-09

申请号：PCT/EP2016/052102

申请日：2016-02-02

Applicant: ASML NETHERLANDS B.V.

Inventor： BANINE, Vadim, Yevgenyevich ,  BRUSSAARD, Gerrit, Jacobus, Hendrik ,  KOPPERT, Willem, Jakobus, Cornelis ,  LUITEN, Otger, Jan ,  NIENHUYS, Han-Kwang ,  BECKERS, Job ,  VAN DER HORST, Ruud, Martinus

IPC: G01J1/58 ,  G01J1/42 ,  G03F7/20 ,  H01S3/13

CPC classification number: G01J1/58 ,  G01J1/4257 ,  G01J1/429 ,  G01T1/2018 ,  G03F7/70558 ,  G03F7/7085 ,  H01S3/0903 ,  H01S3/1305

Abstract: A radiation sensor apparatus for determining a position and/or power of a radiation beam comprises: a chamber for containing a gas; one or more sensors; and a processor. The chamber is provided with a first opening and a second opening such that a radiation beam can enter the chamber through the first opening, propagate through the chamber generally along an axis, and exit the chamber through the second opening. Each of the one or more sensors is arranged to receive and detect radiation emitted from a region of the chamber around the axis. The processor is operable to use the radiation detected by the one or more sensors to determine a position and/or power of a radiation beam propagating through the chamber generally along the axis.

Abstract translation: 用于确定辐射束的位置和/或功率的辐射传感器装置包括：用于容纳气体的腔室; 一个或多个传感器; 和处理器。 腔室设置有第一开口和第二开口，使得辐射束可以通过第一开口进入腔室，大致沿轴线传播通过腔室，并通过第二开口离开腔室。 一个或多个传感器中的每一个被布置成接收和检测围绕轴线的腔室的区域发射的辐射。 处理器可操作以使用由一个或多个传感器检测到的辐射来确定通常沿轴线传播通过腔室的辐射束的位置和/或功率。