公开(公告)号：WO2022136047A1

公开(公告)日：2022-06-30

申请号：PCT/EP2021/085869

申请日：2021-12-15

Applicant: ASML NETHERLANDS B.V.

Inventor： ARABUL, Mustafa, Ümit ,  ZHOU, Zili ,  COENE, Willem, Marie, Julia, Marcel ,  VERSCHUREN, Coen, Adrianus ,  VAN NEER, Paul, Louis, Maria, Joseph ,  PIRAS, Daniele ,  BLAAK, Sandra ,  KOEK, Wouter, Dick ,  WILLEKERS, Robert, Wilhelm

IPC: G01N29/04 ,  G01N29/22 ,  G01N29/24 ,  G01N29/26 ,  G01N29/28 ,  G01N29/34

Abstract: A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.

公开(公告)号：EP4019961A1

公开(公告)日：2022-06-29

申请号：EP20216378.8

申请日：2020-12-22

Applicant: ASML Netherlands B.V.

Inventor： ARABUL, Mustafa Ümit ,  ZHOU, Zili ,  COENE, Willem Marie Julia Marcel ,  VERSCHUREN, Coen Adrianus ,  VAN NEER, Paul Louis Maria Joseph ,  PIRAS, Daniele ,  BLAAK, Sandra ,  KOEK, Wouter, Dick ,  WILLEKERS, Robert Wilhelm

IPC: G01N29/04 ,  G01N29/22 ,  G01N29/24 ,  G01N29/26 ,  G01N29/28 ,  G01N29/34

Abstract: A metrology apparatus for determining one or more parameters of a structure fabricated in or on a semiconductor substrate. The apparatus comprises a transducer array comprising a plurality of transducers positioned in a plane. The plurality of transducers comprises at least one transmitter transducer for emitting acoustic radiation in a frequency range from 1 GHz to 100 GHz towards the structure, and at least one receiver transducer for receiving acoustic radiation reflected and/or diffracted from the structure.