公开(公告)号：WO2019091708A1

公开(公告)日：2019-05-16

申请号：PCT/EP2018/078170

申请日：2018-10-16

Applicant: ASML NETHERLANDS B.V.

Inventor： KUZNETSOV, Alexey, Sergeevich ,  BYSTROV, Kirill ,  BANINE, Vadim, Yevgenyevich ,  VAN DE KERKHOF, Marcus, Adrianus ,  SCHUH, Nadja ,  NIKIPELOV, Andrey

IPC: G03F7/20 ,  B08B7/04 ,  B24C1/00 ,  B24C3/16 ,  B24C5/04 ,  H01L21/67 ,  G02B27/00

Abstract: A method of cleaning a surface to remove a contaminant therefrom, the method comprising the steps of oxidizing at least a portion of the contaminant and passing a stream of carbon dioxide snow over the contaminant. An apparatus for cleaning a surface, the apparatus comprising at least one carbon dioxide snow outlet, and at least one plasma outlet, and a cleaning head comprising at least one carbon dioxide snow outlet and at least one plasma outlet are also disclosed.

公开(公告)号：EP3707560A1

公开(公告)日：2020-09-16

申请号：EP18786339.4

申请日：2018-10-16

Applicant: ASML Netherlands B.V.

Inventor： KUZNETSOV, Alexey, Sergeevich ,  BYSTROV, Kirill ,  BANINE, Vadim, Yevgenyevich ,  VAN DE KERKHOF, Marcus, Adrianus ,  SCHUH, Nadja ,  NIKIPELOV, Andrey

IPC: G03F7/20 ,  B08B7/04 ,  B24C1/00 ,  B24C3/16 ,  B24C5/04 ,  H01L21/67 ,  G02B27/00