公开(公告)号：WO2021130315A1

公开(公告)日：2021-07-01

申请号：PCT/EP2020/087770

申请日：2020-12-23

Applicant: ASML NETHERLANDS B.V.

Inventor： KHEDEKAR, Satej, Subhash ,  VERMA, Alok ,  JONGEN, Martijn ,  BADR, Elie ,  VENSELAAR, Joannes, Jitse ,  ROELOFS, Willem, Seine, Christian ,  KARSSENBERG, Jaap, Goossen ,  SANGUINETTI, Gonzalo, Roberto ,  MICELI, Giacomo ,  CHEN, Kuan-Ming ,  RUTIGLIANI, Vito, Daniele ,  WANG, Shu-jin

IPC: G03F7/20 ,  G01N21/956 ,  G03F7/70616 ,  G03F7/70625 ,  G03F7/70633

Abstract: A target comprising an overlapping grating, wherein the top gratings are positioned in close proximity to an ending of the bottom lying grating.