公开(公告)号：WO2022223277A1

公开(公告)日：2022-10-27

申请号：PCT/EP2022/058898

申请日：2022-04-04

Applicant: ASML NETHERLANDS B.V.

Inventor： AZIMI, Monim ,  LINDEIJER, Tjarco ,  DIJKSTRA, Michel ,  TROMP, Siegfried, Alexander ,  SRIDHAR, Ashwin

IPC: G03F7/20 ,  B24B37/14 ,  B24B37/16 ,  H01L21/687

Abstract: A surface treatment device for treating a surface of a substrate support, wherein the surface treatment device comprises a contacting surface that is configured to contact the surface of the substrate support. The contacting surface is configured with at least a first contour with a first centre of curvature and a second contour with a second centre of curvature, wherein the first centre of curvature and the second centre of curvature are non-coincident points.