公开(公告)号：US20230076185A1

公开(公告)日：2023-03-09

申请号：US17799806

申请日：2021-01-26

Applicant: ASML NETHERLANDS B.V.

Inventor： Maialen LARRANAGA ,  Dimira GKOROU ,  Alexander YPMA

IPC: G05B19/418

Abstract: A method including: determining a sequence of states of an object, the states determined based on processing information associated with the object, wherein the sequence of states includes one or more future states of the object; determining, based on at least one of the states within the sequence of states and the one or more future states, a process metric associated with the object, the process metric including an indication of whether processing requirements for the object are satisfied for individual states in the sequence of states; and initiating an adjustment to processing based on (1) at least one of the states and the one or more future states and (2) the process metric, the adjustment configured to enhance the process metric for the individual states in the sequence of states such that final processing requirements for the object are satisfied.