公开(公告)号：US20230076185A1

公开(公告)日：2023-03-09

申请号：US17799806

申请日：2021-01-26

Applicant: ASML NETHERLANDS B.V.

Inventor： Maialen LARRANAGA ,  Dimira GKOROU ,  Alexander YPMA

IPC: G05B19/418

Abstract: A method including: determining a sequence of states of an object, the states determined based on processing information associated with the object, wherein the sequence of states includes one or more future states of the object; determining, based on at least one of the states within the sequence of states and the one or more future states, a process metric associated with the object, the process metric including an indication of whether processing requirements for the object are satisfied for individual states in the sequence of states; and initiating an adjustment to processing based on (1) at least one of the states and the one or more future states and (2) the process metric, the adjustment configured to enhance the process metric for the individual states in the sequence of states such that final processing requirements for the object are satisfied.

公开(公告)号：US20220128908A1

公开(公告)日：2022-04-28

申请号：US17436113

申请日：2020-02-06

Applicant: ASML NETHERLANDS B.V.

Inventor： Maialen LARRANAGA ,  Dimitra GKOROU ,  Faegheh HASIBI ,  Alexander YPMA

IPC: G03F7/20 ,  G06N20/00

Abstract: A method of extracting a feature from a data set includes iteratively extracting a feature from a data set based on a visualization of a residual pattern within the data set, wherein the feature is distinct from a feature extracted in a previous iteration, and the visualization of the residual pattern uses the feature extracted in the previous iteration. Visualizing the data set using the feature extracted in the previous iteration may include showing residual patterns of attribute data that are relevant to target data. Visualizing the data set using the feature extracted in the previous iteration may involve adding cluster constraints to the data set, based on the feature extracted in the previous iteration. Additionally or alternatively, visualizing the data set using the feature extracted in the previous iteration may involve defining conditional probabilities conditioned on the feature extracted in the previous iteration.

公开(公告)号：US20220083834A1

公开(公告)日：2022-03-17

申请号：US17423658

申请日：2019-12-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Faegheh HASIBI ,  Leon Paul VAN DIJK ,  Maialen LARRANAGA ,  Alexander YPMA ,  Richard Johannes Franciscu VAN HAREN

IPC: G06N3/04

Abstract: A method for predicting a property associated with a product unit. The method may include: obtaining a plurality of data sets, wherein each of the plurality of data sets includes data associated with a spatial distribution of a parameter across the product unit; representing each of the plurality of data sets as a multidimensional object; obtaining a convolutional neural network model trained with previously obtained multidimensional objects and properties of previous product units; and applying the convolutional neural network model to the plurality of multidimensional objects representing the plurality of data sets, to predict the property associated with the product unit.