公开(公告)号：WO2022258251A1

公开(公告)日：2022-12-15

申请号：PCT/EP2022/060585

申请日：2022-04-21

Applicant: ASML NETHERLANDS B.V.

Inventor： ERCISLI, Hasret ,  DOBAN, Alina-Ionela ,  VAN DEN NIEUWELAAR, Norbertus, Josephus, Martinus ,  VAN DAMME, Jean-Philippe, Xavier ,  DE JONG, Frederik, Eduard

IPC: G03F7/20

Abstract: Disclosed herein is a method for determining thermally-induced deformation of a structure in a lithographic apparatus, the method comprising: obtaining timing data for a structure in a lithographic apparatus, wherein the timing data comprises timing data for the current state of the structure and timing history data that comprises timing data for at least one previous state of the structure; and using one or more models to determine thermally-induced deformation data for the structure in dependence on the timing history data and the timing data for the current state of the structure.