公开(公告)号：US20160301180A1

公开(公告)日：2016-10-13

申请号：US15035674

申请日：2014-11-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey Alexandrovich NIKIPELOV ,  Vadim Yevgenyevich BANINE ,  Pieter Willem Herman DE JAGER ,  Gosse Charles DE VRIES ,  Olav Waldemar Vladimir FRIJNS ,  Leonardus Adrianus Gerardus GRIMMINCK ,  Andelko KATALENIC ,  Johannes Antonius Gerardus AKKERMANS ,  Erik LOOPSTRA ,  Wouter Joep ENGELEN ,  Petrus Rutgerus BARTRAIJ ,  Teis Johan COENEN ,  Wilhelmus Patrick Elisabeth Maria OP 'T ROOT

IPC: H01S3/09 ,  H05H7/08 ,  H01J1/34

CPC classification number: H01S3/0903 ,  H01J1/34 ,  H05H7/08 ,  H05H2007/084

Abstract: An injector arrangement for providing an electron beam. The injector arrangement comprises a first injector for providing electron bunches, and a second injector for providing electrons bunches. The injector arrangement is operable in a first mode in which the electron beam comprises electron bunches provided by the first injector only and a second mode in which the electron beam comprises electron bunches provided by the second injector only.

Abstract translation: 一种用于提供电子束的喷射装置。 喷射器装置包括用于提供电子束的第一喷射器和用于提供电子束的第二喷射器。 喷射器装置可以在第一模式中操作，其中电子束包括仅由第一注射器提供的电子束和第二模式，其中电子束包括仅由第二注射器提供的电子束。

公开(公告)号：US20230085971A1

公开(公告)日：2023-03-23

申请号：US17947016

申请日：2022-09-16

Applicant: CARL ZEISS SMT GMBH ,  ASML Netherlands B.V.

Inventor： Galip Tuna TURKBEY ,  Bert VAN LIEROP ,  Alex VAN LANKVELT ,  Erik LOOPSTRA ,  Ahmet Levent AVSAR

IPC: F16F15/023

Abstract: A vibration isolator (10) for supporting a payload and isolating the payload from vibrations has: a pressurized gas compartment (24) formed with a rigid base structure (28), which base structure has an opening (32) covered with a flexible membrane (20) having an inner surface (21) facing into the gas compartment and an outer surface (22) facing in the opposite direction, a support member (12) for supporting the payload, which support member is arranged in contact with the outer surface (22) of the membrane, and a clamping member (62) arranged at the inner surface (21) of the membrane, wherein the support member and the clamping member form a clamping system (66), which system includes at least one magnetic element (64) effecting the membrane to be pressed against the support member.