公开(公告)号：US20240241454A1

公开(公告)日：2024-07-18

申请号：US18619839

申请日：2024-03-28

Applicant: ASML NETHERLANDS B.V.

Inventor： Simon Reinald HUISMAN ,  Sebastianus Adrianus GOORDEN ,  Harm Jan Willem BELT ,  Filippo ALPEGGIANI ,  Irwan Dani SETIJA ,  Henricus Petrus Maria PELLEMANS

IPC: G03F9/00 ,  G03F7/00

CPC classification number: G03F9/7019 ,  G03F7/70633 ,  G03F7/70641 ,  G03F7/706839 ,  G03F7/70725 ,  G03F9/7049 ,  G03F9/7088

Abstract: Disclosed is a method for measuring a parameter of interest from a target and associated apparatuses. The method comprises obtaining measurement acquisition data relating to measurement of a target on a production substrate during a manufacturing phase; obtaining a calibration correction database and/or a trained model having been trained on said calibration correction database, operable to correct for effects in the measurement acquisition data; correcting for effects in the measurement acquisition data using first correction data from said calibration correction database and/or using said trained model so as to obtain corrected measurement data and/or a corrected parameter of interest which is/are corrected for at least said effects; and updating said calibration correction data and/or said trained model with said corrected measurement data and/or corrected parameter of interest.

公开(公告)号：US20240184222A1

公开(公告)日：2024-06-06

申请号：US18443827

申请日：2024-02-16

Applicant: ASML Netherlands B.V.

Inventor： Guido DE HAAN ,  Stephen EDWARD ,  Thomas Jan VAN DEN HOOVEN ,  Paulus Clemens Maria PLANKEN ,  Irwan Dani SETIJA

IPC: G03F9/00

CPC classification number: G03F9/7088 ,  G03F9/7069 ,  G03F9/7084

Abstract: Disclosed is a method for measuring a target located on a substrate beneath at least one layer. The method comprises exciting said at least one layer with pump radiation comprising at least one pump wavelength, so as to generate an acoustic wave within said at least one layer which reflects of said target thereby generating an acoustic replica of said target at a surface of said substrate and illuminating said acoustic replica with probe radiation comprising at least one probe wavelength and capturing the resultant scattered probe radiation, scattered from the acoustic replica. One or both of said exciting step and said illuminating step comprises generating Surface Plasmon Polaritons (SPPs) on residual topography of said at least one layer resultant from said target.

公开(公告)号：US20240094643A1

公开(公告)日：2024-03-21

申请号：US18269983

申请日：2021-12-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Filippo ALPEGGIANI ,  Harm Jan Willem BELT ,  Sebatianus Adrianus GOORDEN ,  Irwan Dani SETIJA ,  Simon Reinald HUISMAN ,  Henricus Petrus Maria PELLEMANS

IPC: G03F7/00

CPC classification number: G03F7/706845 ,  G03F7/70633 ,  G03F7/70641 ,  G03F7/706839

Abstract: A method for measuring a parameter of interest from a target and associated apparatuses. The method includes obtaining measurement acquisition data relating to measurement of the target and finite-size effect correction data and/or a trained model operable to correct for at least finite-size effects in the measurement acquisition data. At least finite-size effects in the measurement acquisition data is corrected for using the finite-size effect correction data and/or the trained model to obtain corrected measurement data and/or obtain a parameter of interest; and where the correcting does not directly determine the parameter of interest, determining the parameter of interest from the corrected measurement data.

公开(公告)号：US20220342228A1

公开(公告)日：2022-10-27

申请号：US17764057

申请日：2020-09-27

Applicant: ASML Netherlands B.V. ,  ASML Holding N.V.

Inventor： Irwan Dani SETIJA ,  Arie Jeffrey DEN BOEF ,  Mohamed SWILLAM ,  Arjan Johannes Anton BEUKMAN

IPC: G02B27/48 ,  G02F1/295 ,  G03F7/20

Abstract: A system includes a radiation source and a phased array. The phased array includes optical elements, waveguides and phase modulators. The phased array generates a beam of radiation. The optical elements radiate radiation waves. The waveguides guide radiation from the radiation source to the optical elements. The phase modulators adjust phases of the radiation waves such that the radiation waves accumulate to form the beam. An amount of incoherence of the beam is based on randomization of the phases.

公开(公告)号：US20190354026A1

公开(公告)日：2019-11-21

申请号：US16478068

申请日：2018-01-10

Applicant: ASML NETHERLANDS B.V.

Inventor： Stefan Michiel WITTE ,  Alessandro ANTONCECCHI ,  Stephen EDWARD ,  Hao ZHANG ,  Paulus Clemens Maria PLANKEN ,  Kjeld Sijbrand Eduard EIKEMA ,  Sebastianus Adrianus GOORDEN ,  Simon Reinald HUISMAN ,  Irwan Dani SETIJA

IPC: G03F9/00 ,  G01B11/24 ,  G01B17/06

Abstract: As increasing numbers of layers, using increasing numbers of specific materials, are deposited on substrates, it becomes increasingly difficult to detect alignment marks accurately for, for example, applying a desired pattern onto a substrate using a lithographic apparatus, in part due to one or more of the materials used in one or more of the layers being wholly or partially opaque to the radiation used to detect alignment marks. In a first step, the substrate is illuminated with excitation radiation. In a second step, at least one effect associated with a reflected material effect scattered by a buried structure is measured. The effect may, for example, include a physical displacement of the surface of the substrate. In a third step, at least one characteristic of the structure based on the measured effect is derived.

公开(公告)号：US20180011014A1

公开(公告)日：2018-01-11

申请号：US15644072

申请日：2017-07-07

Applicant: ASML Netherlands B.V.

Inventor： Irwan Dani SETIJA ,  Petrus Maria VAN DEN BERG

IPC: G01N21/47

CPC classification number: G01N21/4788 ,  G01N2201/12 ,  G03F7/705 ,  G03F7/70625

Abstract: A method of determining electromagnetic scattering properties of a finite periodic structure has the steps: 1002: Calculating a single-cell contrast current density, within a unit-cell supporting domain of a single one of a finite collection of unit cells. 1004: Calculating a scattered electric field outside the finite collection of unit cells, by integrating, over the single unit cell's supporting domain, a Green's function with the determined single-cell contrast current density. 1006: The Green's function is obtained for observation points outside the finite collection of unit cells by summation across the finite collection of unit cells. The Green's function integrated with the determined single-cell contrast current density is obtained for observation points above the supporting domain with respect to a substrate underlying the finite periodic structure. 1008: Determining an electromagnetic scattering property, for example a diffraction pattern, of the finite periodic structure using the calculated scattered electric field.