公开(公告)号：US09754711B2

公开(公告)日：2017-09-05

申请号：US14966814

申请日：2015-12-11

Applicant: ASML NETHERLANDS B.V.

Inventor： Jeroen Lodevicus Gerardus Janssen ,  Johannes Jacobus Hubertus Paulides ,  Elena Andreevna Lomonova ,  Dave Theodorus Everardus Henricus Van Casteren ,  Hans Butler

IPC: H01F7/02 ,  F16F6/00

CPC classification number: H01F7/0236 ,  F16F6/005

Abstract: A vibration isolator is provided including a base structure, a load structure, a displacement structure and at least one vertical open gap formed by opposing and substantially parallel walls of the base structure and the load structure. The opposing walls being at least partly covered by respective arrays of permanent magnets, neighboring magnets in the arrays having alternating magnetization directions, an arrangement of the permanent magnets in the arrays being such that a gravitational force on the load structure is substantially compensated by a net magnetic force of the base structure on the load structure. The displacement structure relatively displaces arrays of permanent magnets of the opposing walls with respect to each along the gap for adjusting a load capacity of the vibration isolator.