公开(公告)号：WO2023030814A1

公开(公告)日：2023-03-09

申请号：PCT/EP2022/071819

申请日：2022-08-03

Applicant: ASML NETHERLANDS B.V.

Inventor： MENG, Xiaodong ,  KANG, Zhiwen ,  ZHANG, Jian ,  QIU, Kangsheng

IPC: G03F7/20

Abstract: Systems, apparatuses, and methods for detecting a location of a positioned sample may include an electrostatic holder configured to hold a sample and form a gap area between an outside edge of the sample and a structure of the electrostatic holder when the electrostatic holder holds the sample, wherein the gap area is coated with a first coating configured to reflect a first wavelength of light with first brightness and to reflect a second wavelength of the light with second brightness, the first wavelength is within a predetermined range of wavelengths, the second wavelength is outside the predetermined range of wavelengths, and the first brightness is higher than the second brightness; a light source configured to direct the light at the gap area; and an optical detector configured to image the light reflected off the gap area.