公开(公告)号：WO2021013521A1

公开(公告)日：2021-01-28

申请号：PCT/EP2020/069007

申请日：2020-07-06

Applicant: ASML NETHERLANDS B.V.

Inventor： SABERT, Hendrik ,  UEBEL, Patrick, Sebastian

IPC: G02F1/0147 ,  G03F7/00 ,  G02F1/383

Abstract: A system and method for providing a light source is disclosed. In one arrangement, the light source comprises an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.

公开(公告)号：WO2021144093A1

公开(公告)日：2021-07-22

申请号：PCT/EP2020/085965

申请日：2020-12-14

Applicant: ASML NETHERLANDS B.V.

Inventor： SABERT, Hendrik ,  UEBEL, Patrick, Sebastian ,  PONGERS, Willem, Richard

IPC: G02F1/383 ,  G03F7/00 ,  G02B6/02 ,  G02F1/01 ,  G02F1/35 ,  G02F1/365 ,  G01B11/25 ,  G02B6/02214 ,  G02B6/02328 ,  G02F1/0147 ,  G02F1/3528

Abstract: A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly comprising: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to comprise a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.

公开(公告)号：WO2021089360A1

公开(公告)日：2021-05-14

申请号：PCT/EP2020/080098

申请日：2020-10-27

Applicant: ASML NETHERLANDS B.V.

Inventor： SABERT, Hendrik ,  TEUNISSEN, Paulus, Antonius, Andreas

IPC: C03B37/012 ,  C03B37/027 ,  C03C15/00 ,  C03C25/68 ,  G02B5/00

Abstract: Disclosed is a method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method comprises obtaining a capillary having capillary wall comprising a first wall thickness; and chemically etching the capillary walls to reduce the wall thickness of the capillary wall. During performance of said etching step a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching step, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured to such a method and various devices comprising such a capillary.

公开(公告)号：WO2021008929A1

公开(公告)日：2021-01-21

申请号：PCT/EP2020/069059

申请日：2020-07-07

Applicant: ASML NETHERLANDS B.V.

Inventor： REIJNDERS, Marinus, Petrus ,  SABERT, Hendrik ,  UEBEL, Patrick, Sebastian

IPC: G03F7/20 ,  G01N21/956 ,  H01S3/13 ,  H01S3/22

Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.

公开(公告)号：EP3865931A1

公开(公告)日：2021-08-18

申请号：EP20156804.5

申请日：2020-02-12

Applicant: ASML Netherlands B.V.

Inventor： SABERT, Hendrik ,  UEBEL, Patrick, Sebastian ,  PONGERS, Willem, Richard

IPC: G02F1/01 ,  G02F1/383 ,  G03F7/00 ,  G02B6/02

Abstract: Hollow-core fibre assembly and methods for converting input radiation to broadband radiation. The hollow-core fire assembly comprises a fibre with a hollow core extending along a length of the fibre from an input end configured to receive input radiation to an output end configured to output broadband radiation. The hollow core of the fibre is configured to comprise a medium. The hollow-core fibre assembly further comprises a density control system configured to control a density profile of the medium along at least a part of the length of the fibre in dependence of a characteristic associated with the wavelength spectrum of the broadband radiation and/or a conversion efficiency of the input radiation to the broadband radiation.

公开(公告)号：EP3819267A1

公开(公告)日：2021-05-12

申请号：EP20203995.4

申请日：2020-10-27

Applicant: ASML Netherlands B.V.

Inventor： SABERT, Hendrik ,  Teunissen, Paulus, Antonius, Andreas

IPC: C03B37/012 ,  C03B37/027 ,  C03C15/00 ,  C03C25/68 ,  G02B5/00

Abstract: Disclosed is a method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method comprises obtaining a capillary having capillary wall comprising a first wall thickness; and chemically etching the capillary walls to reduce the wall thickness of the capillary wall. During performance of said etching step a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching step, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured to such a method and various devices comprising such a capillary.

公开(公告)号：EP3786712A1

公开(公告)日：2021-03-03

申请号：EP19193972.7

申请日：2019-08-28

Applicant: ASML Netherlands B.V.

Inventor： REIJNDERS, Marinus Petrus ,  SABERT, Hendrik ,  UEBEL, Patrick Sebastian

IPC: G03F7/20 ,  G01N21/956 ,  H01S3/13 ,  H01S3/22

Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output. An exemplary method of performing measurements using a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; illuminating a measurement target with light from the light source and measuring light from the light source to generate measurement signals; and using said determined characteristic to process the measurement signals.

公开(公告)号：EP3851904A1

公开(公告)日：2021-07-21

申请号：EP20213776.6

申请日：2020-12-14

Applicant: ASML Netherlands B.V.

Inventor： SABERT, Hendrik ,  UEBEL, Patrick Sebastian ,  PONGERS, Willem Richard

IPC: G02F1/01 ,  G02F1/383 ,  G03F7/00 ,  G02B6/02

Abstract: A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly comprising: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to comprise a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.

公开(公告)号：EP3819266A1

公开(公告)日：2021-05-12

申请号：EP19207624.8

申请日：2019-11-07

Applicant: ASML Netherlands B.V.

Inventor： SABERT, Hendrik

IPC: C03B37/012 ,  C03B37/027 ,  C03C15/00 ,  C03C25/68 ,  G02B5/00

Abstract: Disclosed is a method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method comprises obtaining a capillary having capillary wall comprising a first wall thickness; and chemically etching the capillary walls to reduce the wall thickness of the capillary wall. During performance of said etching step a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching step, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured to such a method and various devices comprising such a capillary.

公开(公告)号：EP3767375A1

公开(公告)日：2021-01-20

申请号：EP19187242.3

申请日：2019-07-19

Applicant: ASML Netherlands B.V.

Inventor： SABERT, Hendrik ,  UEBEL, Patrick Sebastian

IPC: G02F1/01 ,  G02F1/35

Abstract: A system and method for providing a light source is disclosed. In one arrangement, the light source comprises an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.