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公开(公告)号：WO2022167179A1
公开(公告)日：2022-08-11
申请号：PCT/EP2022/050489
申请日：2022-01-12
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Abstract: An optical filter apparatus comprising an optical divergence device, operable to receive optical pulses and spatially distribute the optical pulses over an optical plane in dependence with a pulse energy of each of the optical pulses; and a spatial filter, located at said optical plane, operable to apply spatial filtering to the optical pulses based on a location of each of the optical pulses at the optical plane resulting from the spatial distributing.
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2.发明申请
公开(公告)号：WO2020178008A1
公开(公告)日：2020-09-10
申请号：PCT/EP2020/053999
申请日：2020-02-17
Applicant: ASML NETHERLANDS B.V.
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36cm 3 per cm of length of said hollow-core photonic crystal fiber.
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公开(公告)号：WO2023078619A1
公开(公告)日：2023-05-11
申请号：PCT/EP2022/077286
申请日：2022-09-30
Applicant: ASML NETHERLANDS B.V.
Abstract: Disclosed is a broadband radiation source device, being configured for generating broadband output radiation upon receiving substantially linearly polarized input radiation, comprising: a hollow-core photonic crystal fiber; and at least a first polarization element operable to impose a substantially circular or elliptical polarization on said input radiation prior to being received by said hollow-core photonic crystal fiber and a second polarization element operable in combination with said first polarization element to impose a substantially elliptical polarization on said input radiation, wherein said second polarization element and said first polarization element are oriented such that said elliptical polarization compensates at least partially for birefringence of said hollow-core photonic crystal fiber.
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公开(公告)号：WO2021043593A1
公开(公告)日：2021-03-11
申请号：PCT/EP2020/073422
申请日：2020-08-20
Applicant: ASML NETHERLANDS B.V.
Inventor： GÖTZ, Peter, Maximilian , BAUERSCHMIDT, Sebastian, Thomas , UEBEL, Patrick, Sebastian , HUGERS, Ronald Franciscus Herman , BOER, Jan, Adrianus , BOS, Edwin, Johannes, Cornelis , BROUNS, Andreas, Johannes, Antonius , PROSYENTSOV, Vitaliy , SCHOLTES - VAN EIJK, Paul, William , TEUNISSEN, Paulus, Antonius, Andreas , AJGAONKAR, Mahesh, Upendra
Abstract: Disclosed is a mode control system and method for controlling an output mode of a broadband light source comprising a photonic crystal fiber (PCF). The mode control system comprises at least one detection unit configured to measure one or more parameters of radiation emitted from said broadband light source to generate measurement data; and a processing unit configured to evaluate mode purity of said radiation emitted from said broadband light source, from said measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of said broadband light source. The pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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公开(公告)号：WO2023072687A1
公开(公告)日：2023-05-04
申请号：PCT/EP2022/079008
申请日：2022-10-19
Applicant: ASML NETHERLANDS B.V.
Abstract: A source control arrangement for a radiation source comprising a hollow-core photonic crystal fiber (HC- PCF) having a hollow core with a core diameter, comprising: at least one processor; and a pulse chirping arrangement configured to receive pulsed pump radiation and controllably chirp the pulsed pump radiation so as to output chirped pulsed pump radiation for exciting a working medium comprised within the hollow core of the fiber at a pressure. The at least one processor is operable to configure source parameters of the radiation source, which include one or both of the pressure and a pulse chirp parameter, such that the chirped pulsed pump radiation undergoes a spectral broadening process within the HC-PCF, thereby generating an output radiation having a predefined spectrum for a reference core diameter of the HC-PCF, so as to compensate for variation in the core diameter with respect to the reference core diameter.
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Patent Agency Ranking
公开(公告)号：WO2021233626A1
公开(公告)日：2021-11-25
申请号：PCT/EP2021/060262
申请日：2021-04-20
Applicant: ASML NETHERLANDS B.V.
Abstract: Disclosed is a supercontinuum radiation source comprising a modulator being operable to modulate pump laser radiation comprising a train of radiation pulses to provide modulated pump laser radiation, said modulation being such to selectively provide a burst of said pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
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7.发明申请
公开(公告)号：WO2021037472A1
公开(公告)日：2021-03-04
申请号：PCT/EP2020/071424
申请日：2020-07-29
Applicant: ASML NETHERLANDS B.V.
Inventor： UEBEL, Patrick, Sebastian , BAUERSCHMIDT, Sebastian, Thomas , GÖTZ, Peter, Maximilian , NIKIPELOV, Andrey , ABDOLVAND, Amir , UZUNBAJAKAVA, Natallia, Eduardauna
IPC: G02F1/3501 , G02F1/365
Abstract: A system and method for providing a light source is disclosed. In one arrangement, the light source comprises a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more of: the exchange of gas between the optical path and the remainder of the gas cell; ingress of plasma towards or into the optical fiber; and radical flux towards etch-susceptible surfaces.
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公开(公告)号：WO2021013521A1
公开(公告)日：2021-01-28
申请号：PCT/EP2020/069007
申请日：2020-07-06
Applicant: ASML NETHERLANDS B.V.
Inventor： SABERT, Hendrik , UEBEL, Patrick, Sebastian
IPC: G02F1/0147 , G03F7/00 , G02F1/383
Abstract: A system and method for providing a light source is disclosed. In one arrangement, the light source comprises an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.
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公开(公告)号：WO2022194477A1
公开(公告)日：2022-09-22
申请号：PCT/EP2022/053874
申请日：2022-02-17
Applicant: ASML NETHERLANDS B.V.
Abstract: A radiation source comprising: a hollow core optical fiber comprising a body having a hollow core for confining a working medium, said hollow core optical fiber being operable to receive pulsed pump radiation such that said receive pulsed pump radiation propagates through the hollow core from an input end to an output end of the hollow core optical fiber; wherein source parameters of the radiation source are configured such that the pulsed pump radiation undergoes a soliton self-compression process so as to change a spectrum of the pulsed pump radiation to form output radiation; the broadband light source device further comprising at least one dispersion control mechanism being operable to change dispersion characteristics in a first portion of the optical fiber so as to spectrally shift a dispersive wave generated in the soliton self-compression process.
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公开(公告)号：WO2022161703A1
公开(公告)日：2022-08-04
申请号：PCT/EP2021/086797
申请日：2021-12-20
Applicant: ASML NETHERLANDS B.V.
Abstract: According to one embodiment of the present disclosure there is provided a radiation source for generating broadband radiation, the source comprising an input assembly for providing input radiation and a hollow-core photonic crystal fiber configured to receive and confine the input radiation coupled into the fiber for generating broadband radiation through spectral broadening; the input assembly comprising: a pump source configured to provide input radiation having an average power of at least 50 W; the hollow core photonic crystal fiber comprising: a hollow core having a diameter of at least 35 µm; and a cladding region comprising a plurality of anti-resonant structures surrounding the hollow core, the anti-resonant structures comprising a wall portion having a wall thickness smaller than half the wavelength of the lower end of a wavelength range of the broadband radiation.
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