公开(公告)号：WO2015150315A1

公开(公告)日：2015-10-08

申请号：PCT/EP2015/056873

申请日：2015-03-30

Applicant: ASML NETHERLANDS B.V.

Inventor： NIKIPELOV, Andrey, Alexandrovich ,  AKKERMANS, Johannes, Antonius, Gerardus ,  GRIMMINCK, Leonardus, Adrianus, Gerardus ,  LOOPSTRA, Erik, Roelof ,  RENKENS, Michael, Jozef, Mathijs ,  TOMA, Adrian ,  NIENHUYS, Han-Kwang

IPC: G03F7/20 ,  F17C3/08 ,  F25D19/00 ,  H01F1/055 ,  H01F6/04 ,  H01F7/02 ,  H01S3/09 ,  H05H7/04

CPC classification number: G03F7/70025 ,  G03F7/70008 ,  H01F6/04 ,  H01F7/0273 ,  H01F7/0278 ,  H01S3/0903 ,  H05H7/04 ,  H05H2007/041

Abstract: An undulator (24b) for a free electron laser comprises a pipe (140) for an electron beam and one or more periodic magnetic structures (142) extending axially along the pipe. Each periodic magnetic structure comprises a plurality of magnets (144) and a plurality of passive ferromagnetic elements (148), the plurality of magnets being arranged alternately with the plurality of passive ferromagnetic elements in a line extending in an axial direction. Each of the plurality of magnets is spatially separated from the pipe, and each of the passive ferromagnetic elements extends radially from an adjacent magnet towards the pipe. A spacer element (146) may be provided between the magnets and the pipe to provide radiation shielding for the magnets and/or cooling for the pipe.

Abstract translation: 用于自由电子激光器的波动器（24b）包括用于电子束的管道（140）和沿管道轴向延伸的一个或多个周期性磁性结构（142）。 每个周期性磁性结构包括多个磁体（144）和多个无源铁磁元件（148），所述多个磁体与沿着轴向方向延伸的线中的多个无源铁磁元件交替布置。 多个磁体中的每一个在空间上与管分离，并且每个被动铁磁元件从相邻的磁体径向地延伸到管道。 可以在磁体和管之间设置间隔元件（146），以为磁体提供辐射屏蔽和/或用于管道的冷却。

公开(公告)号：EP3126910B1

公开(公告)日：2019-05-15

申请号：EP15712652.5

申请日：2015-03-30

Applicant: ASML Netherlands B.V.

Inventor： NIKIPELOV, Andrey, Alexandrovich ,  AKKERMANS, Johannes, Antonius, Gerardus ,  GRIMMINCK, Leonardus, Adrianus, Gerardus ,  LOOPSTRA, Erik, Roelof ,  RENKENS, Michael, Jozef, Mathijs ,  TOMA, Adrian ,  NIENHUYS, Han-Kwang

IPC: G03F7/20 ,  F17C3/08 ,  F25D19/00 ,  H01F1/055 ,  H01F6/04 ,  H01F7/02 ,  H01S3/09 ,  H05H7/04

公开(公告)号：EP3126910A1

公开(公告)日：2017-02-08

申请号：EP15712652.5

申请日：2015-03-30

Applicant: ASML Netherlands B.V.

Inventor： NIKIPELOV, Andrey, Alexandrovich ,  AKKERMANS, Johannes, Antonius, Gerardus ,  GRIMMINCK, Leonardus, Adrianus, Gerardus ,  LOOPSTRA, Erik, Roelof ,  RENKENS, Michael, Jozef, Mathijs ,  TOMA, Adrian ,  NIENHUYS, Han-Kwang

IPC: G03F7/20 ,  F17C3/08 ,  F25D19/00 ,  H01F1/055 ,  H01F6/04 ,  H01F7/02 ,  H01S3/09 ,  H05H7/04

CPC classification number: G03F7/70025 ,  G03F7/70008 ,  H01F6/04 ,  H01F7/0273 ,  H01F7/0278 ,  H01S3/0903 ,  H05H7/04 ,  H05H2007/041

Abstract: An undulator for a free electron laser includes a pipe for an electron beam and one or more periodic magnetic structures extending axially along the pipe. Each periodic magnetic structure includes a plurality of magnets and a plurality of passive ferromagnetic elements, the plurality of magnets being arranged alternately with the plurality of passive ferromagnetic elements in a line extending in an axial direction. Each of the plurality of magnets is spatially separated from the pipe, and each of the passive ferromagnetic elements extends radially from an adjacent magnet towards the pipe. A spacer element may be provided between the magnets and the pipe to provide radiation shielding for the magnets and/or cooling for the pipe.

Abstract translation: 用于自由电子激光器的波动器（24b）包括用于电子束的管道（140）和沿管道轴向延伸的一个或多个周期性磁性结构（142）。 每个周期性磁性结构包括多个磁体（144）和多个无源铁磁元件（148），所述多个磁体与沿着轴向延伸的线中的多个无源铁磁元件交替布置。 多个磁体中的每一个在空间上与管分离，并且每个被动铁磁元件从相邻的磁体径向地延伸到管道。 可以在磁体和管之间设置间隔元件（146），以为磁体提供辐射屏蔽和/或用于管道的冷却。