公开(公告)号：WO2019076525A1

公开(公告)日：2019-04-25

申请号：PCT/EP2018/073792

申请日：2018-09-05

Applicant: ASML NETHERLANDS B.V.

Inventor： BOLDER, Joost, Johan ,  HEIJMANS, Peter, Michel, Silvester, Maria ,  VAN DUIVENBODE, Jeroen ,  VRENKEN, Ruud, Hubertus, Silvester

IPC: G03F7/20 ,  H02K41/03 ,  H02K41/035 ,  H02P6/00 ,  H02K3/28 ,  G05B19/416

Abstract: The invention relates to a motor (LD) comprising: • a stationary part (STP), comprising: • a row of coil assemblies (UCA,LCA), the coil assemblies having multiple phases, • a movable part (MP), comprising: • a row of permanent magnets (UPM,LPM), wherein the row of coil assemblies has a first length and the row of permanent magnets has a second length, wherein the second length is smaller than the first length, wherein the coil assemblies are arranged to interact with permanent magnets aligned with the coil assemblies to generate a driving force, • a comparator to compare a position measurement signal representative for an actual position of the movable part with a set- point signal representative for a desired position of the movable part to provide an error signal; • a motion feedback controller configured to provide a control signal on the basis of the error signal; at least one current amplifier configured to provide an actuation signal to the coil assemblies on the basis of the control signal, • wherein the motor comprises a feedforward device, wherein the feedforward device is configured to provide a current amplifier feedforward signal on the basis of the set-point signal, or a derivative thereof, wherein the current amplifier feedforward signal is provided to the at least one current amplifier to compensate for unbalanced back electromotive forces on one or more of the coil assemblies due to the one or more coil assemblies being only partly aligned with the permanent magnets.

公开(公告)号：WO2021185552A1

公开(公告)日：2021-09-23

申请号：PCT/EP2021/054692

申请日：2021-02-25

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus ,  ENGELEN, Johannes, Bernardus, Charles ,  NOTENBOOM, Arnoud, Willem ,  OVERKAMP, Jim, Vincent ,  JANSSEN, Kjeld, Gertrudus, Hendrikus ,  PIJNENBURG, Johannes, Adrianus, Cornelis, Maria ,  VAN DUIVENBODE, Jeroen ,  NIEUWENHUIS, Erik, Johannes ,  VAN BERKEL, Koos

IPC: G03F7/20 ,  H01L21/683 ,  H01L21/687

Abstract: An object holder configured to support an object, the object holder comprising: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; and an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; wherein the electrostatic sheet is bonded to the core body by a bonding material having a thickness of at least 100 nm.

公开(公告)号：WO2010121844A1

公开(公告)日：2010-10-28

申请号：PCT/EP2010/051017

申请日：2010-01-28

Applicant: ASML Netherlands B.V. ,  DAMEN, Johannes ,  VAN DUIVENBODE, Jeroen ,  VAN HOUT, Harm

Inventor： DAMEN, Johannes ,  VAN DUIVENBODE, Jeroen ,  VAN HOUT, Harm

IPC: H01R13/03

CPC classification number: H01R13/53 ,  G03F7/70708 ,  G03F7/70991

Abstract: An electrical connector suitable, for example, for connecting high voltage carrying cables in a low pressure environment comprises a housing having a conducting surface and a plurality of cable insertion parts, each cable insertion part comprising an electrical conductor configured to connect to an electrical cable and an insulating sleeve surrounding the electrical conductor, wherein the housing surrounds the plurality of cable insertion parts.

Abstract translation: 适合于例如用于在低压环境中连接高压承载电缆的电连接器包括具有导电表面和多个电缆插入部分的壳体，每个电缆插入部分包括被配置为连接到电缆的电导体和 围绕所述电导体的绝缘套管，其中所述壳体围绕所述多个电缆插入部分。

公开(公告)号：WO2021233615A1

公开(公告)日：2021-11-25

申请号：PCT/EP2021/060007

申请日：2021-04-18

Applicant: ASML NETHERLANDS B.V.

Inventor： DE GERSEM, Gudrun, Ghilaine, Agnes ,  HAMELINCK, Roger, Franciscus, Mattheus, Maria ,  VAN DUIVENBODE, Jeroen

IPC: H02K41/03 ,  G03F7/20 ,  H02K55/00 ,  H01F6/06

Abstract: The invention provides a magnet assembly for a planar electromagnetic motor, the magnet assembly comprising: - a first plurality of superconductive (SC) coils, inside an outer circumference and arranged in a planar pattern such as a rectangular pattern, - a second plurality of SC coils, arranged along an outer boundary of the planar pattern, a coil of the first plurality of SC coils having a first in-plane shape and a coil of the second plurality of SC coils having a second in-plane shape, different from the first in-plane shape, wherein the second plurality of SC coils is arranged at least partly inside the outer circumference.

公开(公告)号：WO2019197128A3

公开(公告)日：2019-10-17

申请号：PCT/EP2019/057050

申请日：2019-03-21

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DE KERKHOF, Marcus, Adrianus ,  CLOIN, Christian, Gerardus, Norbertus, Hendricus, Marie ,  YAKUNIN, Andrei, Mikhailovich ,  NIKIPELOV, Andrey ,  VAN DUIVENBODE, Jeroen

IPC: G03F7/20 ,  H01L21/683

Abstract: An apparatus comprising an electrostatic clamp for clamping a component, and a mechanism for generating free charges adjacent to the electrostatic clamp. The mechanism for generating free charges is configured to generate free charges adjacent to the electrostatic clamp during a transition from a first energisation state of the electrostatic clamp to a second energisation state of the electrostatic clamp.

公开(公告)号：WO2020109152A1

公开(公告)日：2020-06-04

申请号：PCT/EP2019/082184

申请日：2019-11-22

Applicant: ASML NETHERLANDS B.V.

Inventor： NIKIPELOV, Andrey ,  KURILOVICH, Dmitry ,  SBRIZZAI, Fabio ,  VAN DE KERKHOF, Marcus, Adrianus ,  VAN DER WOORD, Ties, Wouter ,  VAN DER ZANDE, Willem, Joan ,  VAN DUIVENBODE, Jeroen ,  VLES, David, Ferdinand

IPC: G03F1/62 ,  G03F1/82

Abstract: A membrane cleaning apparatus for removing particles from a membrane comprises: a membrane support; and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may comprise: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.

公开(公告)号：WO2019197128A2

公开(公告)日：2019-10-17

申请号：PCT/EP2019/057050

申请日：2019-03-21

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DE KERKHOF, Marcus, Adrianus ,  CLOIN, Christian, Gerardus, Norbertus, Hendricus, Marie ,  YAKUNIN, Andrei, Mikhailovich ,  NIKIPELOV, Andrey ,  VAN DUIVENBODE, Jeroen

IPC: G03F7/20 ,  H01L21/683

Abstract: An apparatus comprising an electrostatic clamp for clamping a component, and a mechanism for generating free charges adjacent to the electrostatic clamp. The mechanism for generating free charges is configured to generate free charges adjacent to the electrostatic clamp during a transition from a first energisation state of the electrostatic clamp to a second energisation state of the electrostatic clamp.

公开(公告)号：WO2018219509A1

公开(公告)日：2018-12-06

申请号：PCT/EP2018/055283

申请日：2018-03-05

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DUIVENBODE, Jeroen ,  VAN GILS, Petrus, Jacobus, Maria ,  VAN DEN OEVER, Petrus, Johannes ,  BALTIS, Coen, Hubertus, Matheus

IPC: G03F7/20 ,  B08B6/00 ,  H01L21/683

Abstract: An apparatus (16) for removing particles from a clamp (4), the apparatus being arrangeable in proximity of the clamp and comprising an insulating portion (18), a supporting portion (20), at least a part or all of the insulating portion being arranged on the supporting portion, wherein the supporting portion is configured such that when a voltage is applied to the supporting portion of the apparatus and/or to an electrode (8) of the clamp, the supporting portion acts as an electrode to allow an electric field to be generated between the apparatus and the clamp for removal of the particles from the clamp.

公开(公告)号：EP4121819A1

公开(公告)日：2023-01-25

申请号：EP21706970.7

申请日：2021-02-25

Applicant: ASML Netherlands B.V.

Inventor： VAN DE VEN, Bastiaan, Lambertus, Wilhelmus, Marinus ,  ENGELEN, Johannes, Bernardus, Charles ,  NOTENBOOM, Arnoud, Willem ,  OVERKAMP, Jim, Vincent ,  JANSSEN, Kjeld, Gertrudus, Hendrikus ,  PIJNENBURG, Johannes, Adrianus, Cornelis, Maria ,  VAN DUIVENBODE, Jeroen ,  NIEUWENHUIS, Erik, Johannes ,  VAN BERKEL, Koos

IPC: G03F7/20 ,  H01L21/683 ,  H01L21/687

公开(公告)号：EP4435976A1

公开(公告)日：2024-09-25

申请号：EP23163896.6

申请日：2023-03-24

Applicant: ASML Netherlands B.V.

Inventor： BEX, Jan ,  RUIJL, Theo, Anjes, Maria ,  RAAYMAKERS, Jeroen, Arnoldus, Leonardus, Johannes ,  DAMEN, Johannes, Wilhelmus ,  VAN DUIVENBODE, Jeroen ,  WULLMS, Pieter, Hubertus, Godefrida

IPC: H01R12/91 ,  H01R13/631 ,  H01R13/6599 ,  H01R13/6594 ,  H01R12/71 ,  H01R12/70 ,  H01R13/24

CPC classification number: G03F7/70841 ,  G03F7/70991 ,  H01R13/6594 ,  H01R13/6599 ,  H01R12/91 ,  H01R12/7082 ,  H01R13/6315 ,  H01R13/2414 ,  H01R13/2421 ,  H01R13/2442 ,  H01R12/714

Abstract: An electrical connector comprising a block of non-conductive flexible polymer, an electrical conductor which extends through the non-conductive flexible polymer from a first end to a second end of the non-conductive flexible polymer block, and a conductive flexible polymer sleeve which extends around a side of the non-conductive flexible polymer block.