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公开(公告)号：WO2023280493A1
公开(公告)日：2023-01-12
申请号：PCT/EP2022/065403
申请日：2022-06-07
Applicant: ASML NETHERLANDS B.V.
Inventor： VAN HERTUM, Pieter , GKOROU, Dimitra , VAN SCHOUBROECK, Joachim, Kinley , KAREVAN, Zahra , YPMA, Alexander
Abstract: A computer implemented method for diagnosing a system comprising a plurality of modules. The method comprises: receiving a causal graph, the causal graph defining (i) a plurality of nodes each representing a module of the system, wherein each module is characterized by one or more signals; and (ii) edges connected between the nodes, the edges representing propagation of performance between modules; generating a reasoning tool by augmenting the causal graph with diagnostics knowledge based on historically determined relations between performance, statistical and causal characteristics of at least one module out of the plurality of modules; obtaining a health metric of the at least one module, wherein the health metric is associated with the one or more signals associated with the at least one module; and using the health metric as an input to the reasoning tool to identify a module that is the most likely cause of the behaviour.
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Patent Agency Ranking
公开(公告)号：EP4116888A1
公开(公告)日：2023-01-11
申请号：EP21184240.6
申请日：2021-07-07
Applicant: ASML Netherlands B.V.
Inventor： VAN HERTUM, Pieter , GKOROU, Dimitra , VAN SCHOUBROECK, Joachim, Kinley , KAREVAN, Zahra , YPMA, Alexander
Abstract: A computer implemented method for diagnosing a system comprising a plurality of modules. The method comprises: receiving a causal graph, the causal graph defining (i) a plurality of nodes each representing a module of the system , wherein each module is characterized by one or more signals; and (ii) edges connected between the nodes, the edges representing propagation of performance between modules; generating a reasoning tool by augmenting the causal graph with diagnostics knowledge based on historically determined relations between performance, statistical and causal characteristics of at least one module out of the plurality of modules; obtaining a health metric of the at least one module, wherein the health metric is associated with the one or more signals associated with the at least one module; and using the health metric as an input to the reasoning tool to identify a module that is the most likely cause of the behaviour.
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公开(公告)号：EP4194951A1
公开(公告)日：2023-06-14
申请号：EP21214040.4
申请日：2021-12-13
Applicant: ASML Netherlands B.V.
Inventor： DOUNAEV, Dimitriy , GKOROU, Dimitra , VAN HERTUM, Pieter , LIJFFIJT, Jefrey , VAN SHOUBROECK, Joachim Kinley , KAREVAN, Zahra , YPMA, Alexander
Abstract: A fault in a subject production apparatus which is suspected of being a deviating machine, is identified based on whether it is possible to train a machine learning model to distinguish between first sensor data derived from the subject production apparatus, and second sensor data derived from one or more other production apparatuses which are assumed to be behaving normally. Thus, the discriminative ability of the machine learning model is used as an indicator to discriminate between a faulty machine and the population of healthy machines.
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公开(公告)号：EP4343472A1
公开(公告)日：2024-03-27
申请号：EP22196685.6
申请日：2022-09-20
Applicant: ASML Netherlands B.V.
Inventor： KOULIERAKIS, Eleftherios , GONZALEZ HUESCA, Juan Manuel , SMAL, Pavel , AARDEN, Frans, Bernard , RAVICHANDRAN, Arvind , DOU, Meng , HUBAUX, Arnaud , VAN HERTUM, Pieter
IPC: G05B19/418
Abstract: One embodiment relates to a method of classifying product units subject to a process performed by an apparatus, the method comprising: receiving KPI data, the KPI data associated with a plurality of components of the apparatus and comprising data associated with a plurality of KPIs; clustering the KPI data to identify a plurality of clusters; analyzing the plurality of clusters to identify a plurality of failure modes associated with the apparatus, for each identified failure mode assigning a threshold to each KPI associated with the failure mode; and for each of the plurality of product units: determining the likelihood of each of the plurality of failure modes based on KPI data of the product unit and the thresholds assigned to each KPI associated with one of the plurality of failure modes; and performing a classification based on the likelihoods of each of the plurality of failure modes.
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公开(公告)号：EP4521181A1
公开(公告)日：2025-03-12
申请号：EP23196601.1
申请日：2023-09-11
Applicant: ASML Netherlands B.V.
Inventor： LANCIA, Carlo , GKOROU, Dimitra , VAN HERTUM, Pieter
IPC: G05B23/02
Abstract: Described is a method for assessing a plurality of candidate actions for obtaining evidence data and relating to an assessment action of at least one manufacturing apparatus or system, the method comprising: obtaining at least one probabilistic model which relates said evidence data to an estimated probability of one or more assessment states of the manufacturing apparatus; determining, using the at least one probabilistic model, an estimated probability of one or more assessment states based on evidence data comprising additional evidence from one or more candidate actions which have not been performed; determining a reward based on the respective estimated probability of the one or more assessment states and an associated respective cost of said one or more candidate actions; and deciding on whether to perform any of said one or more candidate actions based on said reward.
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公开(公告)号：EP4449203A1
公开(公告)日：2024-10-23
申请号：EP22818084.0
申请日：2022-11-21
Applicant: ASML Netherlands B.V.
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