公开(公告)号：WO2018234061A1

公开(公告)日：2018-12-27

申请号：PCT/EP2018/065113

申请日：2018-06-08

Applicant: ASML NETHERLANDS B.V.

Inventor： PATEL, Hrishikesh ,  MA, Yue ,  NAKIBOGLU, Günes ,  RIJPMA, Albert, Pieter ,  VAN DER NET, Antonius, Johannus ,  VERHEES, Rens, Henricus ,  YANG, Zongquan

IPC: G03F7/20 ,  H05G2/00

Abstract: A radiation source (SO) comprising: • a fuel supply device (3) configured to supply fuel; • an excitation device (1) configured to excite the fuel into a plasma (7); • a collector (5) configured to collect radiation emitted by the plasma and to direct the radiation to a beam exit; • a debris mitigation system (20) configured to collect debris generated by the plasma, the debris mitigation system having a component (3, 9B, 21, 22, 23, 24, 27, 28, 29) having a conduit (301) passing therethrough; and • a temperature control system (300) configured to selectively increase or decrease the temperature of the component by selectively heating or cooling a thermal transfer fluid circulating through the conduit.