公开(公告)号：US20210349398A1

公开(公告)日：2021-11-11

申请号：US17282871

申请日：2019-09-19

Applicant: ASML NETHERLANDS B.V.

Inventor： Vahid MOHAMMADI ,  Yassin CHOWDHURY ,  Pieter Cristiaan DE GROOT ,  Wouter Joep ENGELEN ,  Marcel Johannes Petrus Theodorus VAN DER HOORN

IPC: G03F7/20 ,  H01L31/02 ,  H01L31/0216 ,  H01L31/18

Abstract: A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter includes zirconium and SiN3. The radiation filter may form part of a radiation sensor including a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodiode arranged to receive radiation transmitted by the passivation layer, and circuit elements connected to the photodiode. The radiation sensor may perform optical measurements as part of an extreme ultraviolet lithographic apparatus or a lithographic tool.

公开(公告)号：US20230251407A1

公开(公告)日：2023-08-10

申请号：US18003301

申请日：2021-06-17

Applicant: ASML Netherlands B.V.

Inventor： Derick Yun Chek Chong ,  Wouter Joep ENGELEN ,  Vyacheslav KACHKANOV ,  Vahid MOHAMMADI ,  Pieter Cristiaan DE GROOT

IPC: G02B5/18 ,  G03F7/20

CPC classification number: G02B5/1866 ,  G02B5/1857 ,  G03F7/70158 ,  G03F7/706 ,  G03F7/7085 ,  G02B2207/107

Abstract: A transmissive diffraction grating for a phase-stepping measurement system for determining an aberration map for a projection system comprises an absorbing layer. The diffraction grating is for use with radiation having a first wavelength (for example (EUV radiation). The absorbing layer is provided with a two-dimensional array of through-apertures. The absorbing layer is formed from a material which has a refractive index for the radiation having the first wavelength in the range 0.% to 1.04.