公开(公告)号：US20220276553A1

公开(公告)日：2022-09-01

申请号：US17637891

申请日：2020-08-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey NIKIPELOV ,  Sander BALTUSSEN ,  Vadim Yevgenyevich BANINE ,  Alexandr DOLGOV ,  DONMEZ NOYAN ,  Zomer Silvester HOUWELING ,  Arnoud Willem NOTENBOOM ,  Marcus Adrianus VAN DE KERKHOF ,  Ties Wouter VAN DER WOORD ,  Paul Alexander VERMEULEN ,  David Ferdinand VLES ,  Victoria VORONINA ,  Halil Gökay YEGEN

IPC: G03F1/62 ,  C01B32/158 ,  G03F7/20

Abstract: A pellicle membrane for a lithographic apparatus, the membrane including uncapped carbon nanotubes. A method of regenerating a pellicle membrane, the method including decomposing a precursor compound and depositing at least some of the products of decomposition onto the pellicle membrane. A method of reducing the etch rate of a pellicle membrane, the method including providing an electric field in the region of the pellicle membrane to redirect ions from the pellicle, or heating elements to desorb radicals from the pellicle, preferably wherein the pellicle membrane is a carbon nanotube pellicle membrane. An assembly for a lithographic apparatus, the assembly including a biased electrode near or including the pellicle membrane or heating means for the pellicle membrane.

公开(公告)号：US20200183288A1

公开(公告)日：2020-06-11

申请号：US16638790

申请日：2018-07-19

Applicant: ASML NETHERLANDS B.V.

Inventor： Yang-Shan HUANG ,  Andre Bernardus JEUNINK ,  Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN ,  Victoria VORONINA

IPC: G03F7/20

Abstract: A clear-out tool is described, the clear-out tool being configured to at least partially remove a masking layer from a target area of an object using a laser beam. The clear-out tool includes a barrier member configured to be arranged above a surface of the object containing the target area and configured to contain a liquid in a space next to the target area or surrounding the target area.

公开(公告)号：US20210079519A1

公开(公告)日：2021-03-18

申请号：US16971012

申请日：2019-02-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Pieter Willem Herman DE JAGER ,  Sander Frederik WUISTER ,  Marie-Claire VAN LARE ,  Ruben Cornelis MAAS ,  Alexey Olegovich POLYAKOV ,  Tamara DRUZHININA ,  Victoria VORONINA ,  Evgenia KURGANOVA ,  Jim Vincent OVERKAMP ,  Bernardo KASTRUP ,  Maarten VAN KAMPEN ,  Alexandr DOLGOV

IPC: C23C16/04 ,  C23C16/455 ,  C23C16/48

Abstract: Methods and apparatuses for forming a patterned layer of material are disclosed. In one arrangement, a selected portion of a surface of a substrate is irradiated with electromagnetic radiation having a wavelength of less than 100 nm during a deposition process. Furthermore, an electric field controller is configured to apply an electric field that is oriented so as to force secondary electrons away from the substrate. The irradiation locally drives the deposition process in the selected portion and thereby causes the deposition process to, for example, form a layer of material in a pattern defined by the selected portion.

公开(公告)号：US20200152527A1

公开(公告)日：2020-05-14

申请号：US16625861

申请日：2018-05-28

Applicant: ASML NETHERLANDS B.V.

Inventor： Andre Bernardus JEUNINK ,  Victoria VORONINA ,  Tamara DRUZHININA ,  Brennan PETERSON ,  Johannes Adrianus Cornelis Maria PIJNENBURG

IPC: H01L21/66 ,  H01L23/544 ,  H01L21/311 ,  G03F9/00

Abstract: A method for revealing sensor targets on a substrate covered with a layer, the method including: obtaining locations of first areas on the substrate with yielding target portions and of second areas on the substrate with non-yielding target portions; at least partially removing feature regions of the layer covering sensor targets in the second areas to reveal sensor targets in the second areas; measuring a location of the revealed sensor targets in the second areas; determining a location of sensor targets in the first areas based on the measured location of the revealed sensor targets in the second areas; and at least partially removing sensor target regions of the layer covering the sensor targets in the first areas using the determined location of the sensor targets in the first areas.