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公开(公告)号：WO2022189082A1
公开(公告)日：2022-09-15
申请号：PCT/EP2022/052892
申请日：2022-02-07
Applicant: ASML NETHERLANDS B.V.
Inventor： KLEIN KOERKAMP, Niek, Willem , HAUPTMANN, Marc , KEYVANI JANBAHAN, Aliasghar , WANG, Jingchao
Abstract: Methods and apparatus for characterizing a semiconductor manufacturing process performed on a substrate. First data is obtained associated with fingerprint data of the substrate measured after a first process step. Second data is obtained associated with fingerprint data of the substrate measured after a second processing step. A statistical model is used to decompose the first and second data into a first class of fingerprint components mutually correlating between the first and second data and a second class of fingerprint components not mutually correlating between the first and second data. At least one of the first class fingerprint of components and the second class of fingerprint components are used to characterize the semiconductor manufacturing process.
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公开(公告)号：EP4057069A1
公开(公告)日：2022-09-14
申请号：EP21162049.7
申请日：2021-03-11
Applicant: ASML Netherlands B.V.
Inventor： KLEIN KOERKAMP, Niek Willem , HAUPTMANN, Marc , KEYVANI JANBAHAN, Aliasghar , WANG, Jingchao
Abstract: Methods and apparatus for characterizing a semiconductor manufacturing process performed on a substrate. First data is obtained associated with fingerprint data of the substrate measured after a first process step. Second data is obtained associated with fingerprint data of the substrate measured after a second processing step. The first and second data are decomposed into a first class of fingerprint components mutually correlating between the first and second data and a second class of fingerprint components not mutually correlating between the first and second data. At least one of the first class fingerprint of components and the second class of fingerprint components are used to characterize the semiconductor manufacturing process.
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公开(公告)号：EP4305494A1
公开(公告)日：2024-01-17
申请号：EP22703410.5
申请日：2022-02-07
Applicant: ASML Netherlands B.V.
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